发明申请
- 专利标题: SELF-ASSEMBLY OF BLOCK COPOLYMERS ON TOPOGRAPHICALLY PATTERNED POLYMERIC SUBSTRATES
- 专利标题(中): 嵌入式聚合物基板上的嵌段共聚物自组装
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申请号: US12553484申请日: 2009-09-03
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公开(公告)号: US20100075116A1公开(公告)日: 2010-03-25
- 发明人: Thomas P. Russell , Soojin Park , Doug Hyun Lee , Ting Xu
- 申请人: Thomas P. Russell , Soojin Park , Doug Hyun Lee , Ting Xu
- 主分类号: B32B3/00
- IPC分类号: B32B3/00 ; B05D5/00
摘要:
Highly-ordered block copolymer films are prepared by a method that includes forming a polymeric replica of a topographically patterned crystalline surface, forming a block copolymer film on the topographically patterned surface of the polymeric replica, and annealing the block copolymer film. The resulting structures can be used in a variety of different applications, including the fabrication of high density data storage media. The ability to use flexible polymers to form the polymeric replica facilitates industrial-scale processes utilizing the highly-ordered block copolymer films.
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