发明申请
US20100077516A1 PLATINUM SILICIDE TIP APICES FOR PROBE-BASED TECHNOLOGIES
有权
用于基于探针的技术的二氧化钛硅胶贴片APICES
- 专利标题： PLATINUM SILICIDE TIP APICES FOR PROBE-BASED TECHNOLOGIES
- 专利标题（中）： 用于基于探针的技术的二氧化钛硅胶贴片APICES
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申请号： US12234816申请日： 2008-09-22
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公开(公告)号： US20100077516A1公开(公告)日： 2010-03-25
- 发明人: Harish Bhaskaran , Michel Despont , Ute Drechsler , Abu Sebastian
- 申请人： Harish Bhaskaran , Michel Despont , Ute Drechsler , Abu Sebastian
- 申请人地址： US NY Armonk
- 专利权人： International Business Machines Corporation
- 当前专利权人： International Business Machines Corporation
- 当前专利权人地址： US NY Armonk
- 主分类号： G01N13/16
- IPC分类号： G01N13/16
摘要：
Tips including a platinum silicide at an apex of a single crystal silicon tip are provided herein. Also, techniques for creating a tip are provided. The techniques include depositing an amount of platinum (Pt) on a single crystal silicon tip, annealing the platinum and single crystal silicon tip to form a platinum silicide, and selectively etching the platinum with respect to the formed platinum silicide.
公开/授权文献
- US08332961B2 Platinum silicide tip apices for probe-based technologies 公开/授权日：2012-12-11
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