发明申请
- 专利标题： DRESSING METHOD, METHOD OF DETERMINING DRESSING CONDITIONS, PROGRAM FOR DETERMINING DRESSING CONDITIONS, AND POLISHING APPARATUS
- 专利标题（中）： 连接方法，确定条件条件的方法，确定条件的程序和抛光装置
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申请号： US12566224申请日： 2009-09-24
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公开(公告)号： US20100081361A1公开(公告)日： 2010-04-01
- 发明人: Akira Fukuda , Yoshihiro Mochizuki , Yutaka Wada , Yoichi Shiokawa , Hirokuni Hiyama
- 申请人： Akira Fukuda , Yoshihiro Mochizuki , Yutaka Wada , Yoichi Shiokawa , Hirokuni Hiyama
- 优先权： JP2008-247450 20080926
- 主分类号： B24B53/02
- IPC分类号： B24B53/02 ; B24B1/00 ; B24B53/12
摘要：
A method of dressing a polishing member with a diamond dresser having diamond particles arranged on a surface thereof is provided. The method includes determining dressing conditions by performing a simulation of a distribution of a sliding distance of the diamond dresser on a surface of the polishing member, and dressing the polishing member with the diamond dresser under the dressing conditions determined. The simulation includes calculation of the sliding distance corrected in accordance with a depth of the diamond particles thrusting into the polishing member.
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