发明申请
- 专利标题: INTEGRATED CIRCUIT DEVICE AND METHOD
- 专利标题(中): 集成电路设备和方法
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申请号: US12581573申请日: 2009-10-19
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公开(公告)号: US20100099223A1公开(公告)日: 2010-04-22
- 发明人: Joachim Mahler , Thomas Behrens , Ivan Galesic
- 申请人: Joachim Mahler , Thomas Behrens , Ivan Galesic
- 申请人地址: DE Neubiberg
- 专利权人: Infineon Technologies AG
- 当前专利权人: Infineon Technologies AG
- 当前专利权人地址: DE Neubiberg
- 主分类号: H01L21/56
- IPC分类号: H01L21/56
摘要:
An integrated circuit device includes a semiconductor chip with a metallization layer on the chip. A gas-phase deposited insulation layer is disposed on the metallization layer.
公开/授权文献
- US08187964B2 Integrated circuit device and method 公开/授权日:2012-05-29
信息查询
IPC分类: