Method and device for producing a parylene coating
    1.
    发明授权
    Method and device for producing a parylene coating 有权
    用于生产聚对二甲苯涂层的方法和装置

    公开(公告)号:US08883268B2

    公开(公告)日:2014-11-11

    申请号:US13583755

    申请日:2011-03-08

    IPC分类号: B05D1/00 B05D3/14 H01L51/52

    摘要: A method of producing a parylene coating on at least one surface of at least one component includes providing a first gas containing parylene monomers and depositing the parylene monomers on the at least one surface of the component by supplying the first gas containing the parylene monomers by a first nozzle to the at least one surface, wherein the component is disposed in an environment at atmospheric pressure.

    摘要翻译: 在至少一种组分的至少一个表面上生产聚对二甲苯涂层的方法包括提供含有聚对二甲苯单体的第一气体,并通过将含有聚对二甲苯单体的第一气体通过 第一喷嘴到所述至少一个表面,其中所述部件设置在大气压的环境中。

    METHOD AND DEVICE FOR PRODUCING A PARYLENE COATING
    9.
    发明申请
    METHOD AND DEVICE FOR PRODUCING A PARYLENE COATING 有权
    用于生产PARYLENE涂料的方法和装置

    公开(公告)号:US20130189447A1

    公开(公告)日:2013-07-25

    申请号:US13583755

    申请日:2011-03-08

    IPC分类号: B05D1/00

    摘要: A method of producing a parylene coating on at least one surface of at least one component includes providing a first gas containing parylene monomers and depositing the parylene monomers on the at least one surface of the component by supplying the first gas containing the parylene monomers by a first nozzle to the at least one surface, wherein the component is disposed in an environment at atmospheric pressure.

    摘要翻译: 在至少一种组分的至少一个表面上生产聚对二甲苯涂层的方法包括提供含有聚对二甲苯单体的第一气体,并通过将含有聚对二甲苯单体的第一气体通过 第一喷嘴到所述至少一个表面,其中所述部件设置在大气压的环境中。