发明申请
- 专利标题: NONVOLATILE SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR MANUFACTURING SAME
- 专利标题(中): 非易失性半导体存储器件及其制造方法
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申请号: US12563832申请日: 2009-09-21
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公开(公告)号: US20100109072A1公开(公告)日: 2010-05-06
- 发明人: Masaru KIDOH , Hiroyasu Tanaka , Ryota Katsumata , Masaru Kito , Yosuke Komori , Megumi Ishiduki , Hideaki Aochi , Yoshiaki Fukuzumi
- 申请人: Masaru KIDOH , Hiroyasu Tanaka , Ryota Katsumata , Masaru Kito , Yosuke Komori , Megumi Ishiduki , Hideaki Aochi , Yoshiaki Fukuzumi
- 申请人地址: JP Tokyo
- 专利权人: KABUSHIKI KAISHA TOSHIBA
- 当前专利权人: KABUSHIKI KAISHA TOSHIBA
- 当前专利权人地址: JP Tokyo
- 优先权: JP2008-284375 20081105
- 主分类号: H01L27/115
- IPC分类号: H01L27/115 ; H01L21/8246
摘要:
A nonvolatile semiconductor memory device includes a first stacked body on a silicon substrate, and a second stacked body is provided thereon. The first stacked body includes a plurality of insulating films alternately stacked with a plurality of electrode films, and a first portion of a through-hole extending in a stacking direction is formed. The second stacked body includes a plurality of insulating films alternately stacked with a plurality of electrode films, and a second portion of the through-hole is formed. A memory film is formed on an inner face of the through-hole, and a silicon pillar is buried in an interior of the through-hole. A central axis of the second portion of the through-hole is shifted from a central axis of the first portion, and a lower end of the second portion is positioned lower than an upper portion of the first portion.
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