发明申请
US20100126001A1 Method for self aligning a lapping guide with a structure of a magnetic write head
有权
用于将研磨引导件与磁性写入头的结构自对准的方法
- 专利标题: Method for self aligning a lapping guide with a structure of a magnetic write head
- 专利标题(中): 用于将研磨引导件与磁性写入头的结构自对准的方法
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申请号: US12646884申请日: 2009-12-23
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公开(公告)号: US20100126001A1公开(公告)日: 2010-05-27
- 发明人: Christian Rene Bonhote , Thomas Budley Boone, JR. , Quang Le , Jui-Lung Li , Jeffrey S. Lille , Scott Arthur MacDonald , Neil Leslie Robertson , Xhavin Sinha , Petrus Antonius Van Der Heijden
- 申请人: Christian Rene Bonhote , Thomas Budley Boone, JR. , Quang Le , Jui-Lung Li , Jeffrey S. Lille , Scott Arthur MacDonald , Neil Leslie Robertson , Xhavin Sinha , Petrus Antonius Van Der Heijden
- 专利权人: HITACHI GLOBAL STORAGE TECHNOLOGIES
- 当前专利权人: HITACHI GLOBAL STORAGE TECHNOLOGIES
- 主分类号: G11B5/127
- IPC分类号: G11B5/127
摘要:
A method for self aligning a lapping guide with a structure of a write pole. A write pole is formed over a substrate and an electrically conductive material lapping guide material is deposited in a location that is removed from the write pole. A mask is then formed over a portion of the write pole and a portion of the electrically conductive material. A material removal process such as reactive ion etching can then be performed to remove a portion of the magnetic material that is not protected by the mask structure. An magnetic material is then electroplated over the write pole with the write pole, with the mask still in place. In this way, the electroplated material has an edge that is self aligned with an edge of the electrically conductive lapping guide material, both being defined by the same mask structure.
公开/授权文献
- US08230583B2 Method for manufacturing a magnetic write head 公开/授权日:2012-07-31
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