公开(公告)号：US08634162B2

公开(公告)日：2014-01-21

申请号：US11683972

申请日：2007-03-08

申请人： Christian Rene Bonhote ,  Thomas Dudley Boone, Jr. ,  Quang Le ,  Jui-Lung Li ,  Jeffrey S. Lille ,  Scott Arthur MacDonald ,  Neil Leslie Robertson ,  Xhavin Sinha ,  Petrus Antonius Van Der Heijden

发明人： Christian Rene Bonhote ,  Thomas Dudley Boone, Jr. ,  Quang Le ,  Jui-Lung Li ,  Jeffrey S. Lille ,  Scott Arthur MacDonald ,  Neil Leslie Robertson ,  Xhavin Sinha ,  Petrus Antonius Van Der Heijden

IPC分类号： G11B5/147

CPC分类号： G11B5/3146 ,  G11B5/11 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/315 ,  G11B5/3166 ,  G11B5/3169

摘要： A magnetic write head for data recording having a magnetic write pole with a stepped magnetic shell structure that defines a secondary flare point. The secondary flare point defined by the magnetic shell portion can be more tightly controlled with respect to its distance from the air bearing surface (ABS) of the write head than can a traditional flare point that is photolithographically on the main pole structure. This allows the effective flare point of the write head to be moved much closer to the ABS than would otherwise be possible using currently available tooling and photolithography techniques. The write head may also include a magnetic trailing shield that wraps around the main pole portion. The trailing shield can have a hack edge defining a trailing shield throat height that is either between the secondary flare point or coincident or behind the secondary flare point, depending on design requirements.

摘要翻译： 一种用于数据记录的磁写头，具有限定二次闪光点的阶梯状磁性壳结构的磁性写入极。 由磁性壳体部分限定的次级火炬点可以相对于与写入磁头的空气轴承表面（ABS）的距离比在主极结构上光刻的传统闪光点更加严格地控制。 这使得使用当前可用的工具和光刻技术可以使写入头的有效喇叭点移动得更接近ABS。 写头还可以包括围绕主极部分包裹的磁​​性后挡板。 后挡板可以具有限定根据设计要求在二次火炬点之间或者在二次火炬点之间或后面的尾部屏蔽喉部高度的黑色边缘。

公开(公告)号：US08797685B2

公开(公告)日：2014-08-05

申请号：US12646879

申请日：2009-12-23

申请人： Christian Rene Bonhote ,  Jeffrey S. Lille ,  Scott Arthur MacDonald ,  Xhavin Sinha ,  Petrus Antonius Van Der Heijden

发明人： Christian Rene Bonhote ,  Jeffrey S. Lille ,  Scott Arthur MacDonald ,  Xhavin Sinha ,  Petrus Antonius Van Der Heijden

IPC分类号： G11B5/127

CPC分类号： G11B5/3146 ,  G11B5/11 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/315 ,  G11B5/3166 ,  G11B5/3169

摘要： A magnetic write head for data recording having a magnetic write pole with a stepped magnetic shell structure that defines a secondary flare point. The secondary flare point defined by the magnetic shell portion can be more tightly controlled with respect to its distance from the air bearing surface (ABS) of the write head than can a traditional flare point that is photolithographically on the main pole structure. This allows the effective flare point of the write head to be moved much closer to the ABS than would otherwise be possible using currently available tooling and photolithography techniques. The write head also includes a non-magnetic spacer layer formed over the magnetic shell structure that is recessed from the ABS by a distance that is greater than that of the magnetic shell portion. A magnetic shield is formed over the magnetic shell and non-magnetic spacer.

摘要翻译： 一种用于数据记录的磁写头，具有限定二次闪光点的阶梯状磁性壳结构的磁性写入极。 由磁性壳体部分限定的次级火炬点可以相对于与写入磁头的空气轴承表面（ABS）的距离比在主极结构上光刻的传统闪光点更加严格地控制。 这使得使用当前可用的工具和光刻技术可以使写入头的有效喇叭点移动得更接近ABS。 写头还包括形成在磁性壳结构上的非磁性间隔层，其从ABS凹陷的距离大于磁性壳部分的距离。 在磁性壳体和非磁性间隔物上形成磁屏蔽。

公开(公告)号：US20100091407A1

公开(公告)日：2010-04-15

申请号：US12646879

申请日：2009-12-23

申请人： Christian Rene Bonhote ,  Thomas Dudley Boone, JR. ,  Quang Le ,  Jui-Lung Li ,  Jeffrey S. Lille ,  Scott Arthur MacDonald ,  Neil Leslie Robertson ,  Xhavin Sinha ,  Petrus Antonius Van Der Heijden

发明人： Christian Rene Bonhote ,  Thomas Dudley Boone, JR. ,  Quang Le ,  Jui-Lung Li ,  Jeffrey S. Lille ,  Scott Arthur MacDonald ,  Neil Leslie Robertson ,  Xhavin Sinha ,  Petrus Antonius Van Der Heijden

IPC分类号： G11B5/60 ,  G11B5/127

CPC分类号： G11B5/3146 ,  G11B5/11 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/315 ,  G11B5/3166 ,  G11B5/3169

摘要： A magnetic write head for data recording having a magnetic write pole with a stepped magnetic shell structure that defines a secondary flare point. The secondary flare point defined by the magnetic shell portion can be more tightly controlled with respect to its distance from the air bearing surface (ABS) of the write head than can a traditional flare point that is photolithographically on the main pole structure. This allows the effective flare point of the write head to be moved much closer to the ABS than would otherwise be possible using currently available tooling and photolithography techniques. The write head also includes a non-magnetic spacer layer formed over the magnetic shell structure that is recessed from the ABS by a distance that is greater than that of the magnetic shell portion. A magnetic shield is formed over the magnetic shell and non-magnetic spacer.

摘要翻译： 一种用于数据记录的磁写头，具有限定二次闪光点的阶梯状磁性壳结构的磁性写入极。 由磁性壳体部分限定的次级火炬点可以相对于与写入磁头的空气轴承表面（ABS）的距离比在主极结构上光刻的传统闪光点更加严格地控制。 这使得使用当前可用的工具和光刻技术可以使写入头的有效喇叭点移动得更接近ABS。 写头还包括形成在磁性壳结构上的非磁性间隔层，其从ABS凹陷的距离大于磁性壳部分的距离。 在磁性壳体和非磁性间隔物上形成磁屏蔽。

公开(公告)号：US08021535B2

公开(公告)日：2011-09-20

申请号：US12005556

申请日：2007-12-26

申请人： Christian Rene Bonhote ,  Quang Le ,  Xhavin Sinha

发明人： Christian Rene Bonhote ,  Quang Le ,  Xhavin Sinha

IPC分类号： C25D5/02

CPC分类号： C25D7/123 ,  C25D5/022

摘要： Methods and structures for electroplating shield structures for perpendicular thin film write poles having ultra thin non-magnetic top gaps on the order of a few nanometers are disclosed. Ultra thin, conductive seed layers serve a dual purpose as both plating seed layer and non-magnetic top gap for the write pole. Due to reduced current carrying capacity of ultra thin seed layers, an additional thick seed layer is also employed to aid delivering plating current to regions near the pole.

摘要翻译： 公开了具有几纳米数量级的超薄非磁性顶部间隙的垂直薄膜写入极的电镀屏蔽结构的方法和结构。 超薄导电种子层具有双重目的，作为电极种子层和写入极的非磁性顶部间隙。 由于超薄种子层的电流承载能力降低，还使用另外的厚种子层来帮助将电镀电流传递到极附近的区域。

公开(公告)号：US20100128392A1

公开(公告)日：2010-05-27

申请号：US12646858

申请日：2009-12-23

申请人： Christian Rene Bonhote ,  Thomas Dudley Boone, JR. ,  Quang Le ,  Jui-Lung Li ,  Jeffrey S. Lille ,  Scott Arthur MacDonald ,  Neil Leslie Robertson ,  Xhavin Sinha ,  Petrus Antonius Van Der Heijden

发明人： Christian Rene Bonhote ,  Thomas Dudley Boone, JR. ,  Quang Le ,  Jui-Lung Li ,  Jeffrey S. Lille ,  Scott Arthur MacDonald ,  Neil Leslie Robertson ,  Xhavin Sinha ,  Petrus Antonius Van Der Heijden

IPC分类号： G11B5/127

CPC分类号： G11B5/3146 ,  G11B5/11 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/315 ,  G11B5/3166 ,  G11B5/3169

摘要： A magnetic write head for data recording having a magnetic write pole with a stepped magnetic shell structure that defines a secondary flare point. The secondary flare point defined by the magnetic shell portion can be more tightly controlled with respect to its distance from the air bearing surface (ABS) of the write head than can a traditional flare point that is photolithographically on the main pole structure. This allows the effective flare point of the write head to be moved much closer to the ABS than would otherwise be possible using currently available tooling and photolithography techniques. The write head also includes a non-magnetic spacer layer formed over the magnetic shell structure and a trailing magnetic shield, a portion of which is formed over the non-magnetic spacer.

摘要翻译： 一种用于数据记录的磁写头，具有限定二次闪光点的阶梯状磁性壳结构的磁性写入极。 由磁性壳体部分限定的次级火炬点可以相对于与写入磁头的空气轴承表面（ABS）的距离比在主极结构上光刻的传统闪光点更加严格地控制。 这使得使用当前可用的工具和光刻技术可以使写入头的有效喇叭点移动得更接近ABS。 写头还包括形成在磁性壳结构上的非磁性间隔层和尾部磁屏蔽，其一部分形成在非磁性间隔物上。

公开(公告)号：US20100126001A1

公开(公告)日：2010-05-27

申请号：US12646884

申请日：2009-12-23

申请人： Christian Rene Bonhote ,  Thomas Budley Boone, JR. ,  Quang Le ,  Jui-Lung Li ,  Jeffrey S. Lille ,  Scott Arthur MacDonald ,  Neil Leslie Robertson ,  Xhavin Sinha ,  Petrus Antonius Van Der Heijden

发明人： Christian Rene Bonhote ,  Thomas Budley Boone, JR. ,  Quang Le ,  Jui-Lung Li ,  Jeffrey S. Lille ,  Scott Arthur MacDonald ,  Neil Leslie Robertson ,  Xhavin Sinha ,  Petrus Antonius Van Der Heijden

IPC分类号： G11B5/127

CPC分类号： G11B5/3146 ,  G11B5/11 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/315 ,  G11B5/3166 ,  G11B5/3169

摘要： A method for self aligning a lapping guide with a structure of a write pole. A write pole is formed over a substrate and an electrically conductive material lapping guide material is deposited in a location that is removed from the write pole. A mask is then formed over a portion of the write pole and a portion of the electrically conductive material. A material removal process such as reactive ion etching can then be performed to remove a portion of the magnetic material that is not protected by the mask structure. An magnetic material is then electroplated over the write pole with the write pole, with the mask still in place. In this way, the electroplated material has an edge that is self aligned with an edge of the electrically conductive lapping guide material, both being defined by the same mask structure.

摘要翻译： 一种用于将研磨导向器与写入杆的结构自对准的方法。 写入极在衬底上形成，并且导电材料研磨引导材料沉积在从写柱移除的位置。 然后在写入极的一部分和导电材料的一部分上形成掩模。 然后可以执行诸如反应离子蚀刻的材料去除处理以去除未被掩模结构保护的磁性材料的一部分。 然后将磁性材料用写入极电镀在写入极上，同时掩模仍然在位。 以这种方式，电镀材料具有与导电研磨导向材料的边缘自对准的边缘，两者都由相同的掩模结构限定。

公开(公告)号：US20090166210A1

公开(公告)日：2009-07-02

申请号：US12005556

申请日：2007-12-26

申请人： Christian Rene Bonhote ,  Quang Le ,  Xhavin Sinha

发明人： Christian Rene Bonhote ,  Quang Le ,  Xhavin Sinha

IPC分类号： C25D7/12

CPC分类号： C25D7/123 ,  C25D5/022

摘要： Methods and structures for electroplating shield structures for perpendicular thin film write poles having ultra thin non-magnetic top gaps on the order of a few nanometers are disclosed. Ultra thin, conductive seed layers serve a dual purpose as both plating seed layer and non-magnetic top gap for the write pole. Due to reduced current carrying capacity of ultra thin seed layers, an additional thick seed layer is also employed to aid delivering plating current to regions near the pole.

摘要翻译： 公开了具有几纳米数量级的超薄非磁性顶部间隙的垂直薄膜写入极的电镀屏蔽结构的方法和结构。 超薄导电种子层具有双重目的，作为电极种子层和写入极的非磁性顶部间隙。 由于超薄种子层的电流承载能力降低，还使用另外的厚种籽层来帮助将电镀电流输送到极附近的区域。

公开(公告)号：US20080316652A1

公开(公告)日：2008-12-25

申请号：US11766711

申请日：2007-06-21

申请人： Christian Rene Bonhote ,  Thomas Dudley Boone, JR. ,  Ming Jiang ,  Jordan Asher Katine ,  Quang Le ,  Yinshi Liu ,  Xhavin Sinha ,  Sue Siyang Zhang ,  Yi Zheng

发明人： Christian Rene Bonhote ,  Thomas Dudley Boone, JR. ,  Ming Jiang ,  Jordan Asher Katine ,  Quang Le ,  Yinshi Liu ,  Xhavin Sinha ,  Sue Siyang Zhang ,  Yi Zheng

IPC分类号： G11B5/10

CPC分类号： G11B5/3166 ,  G11B5/112 ,  G11B5/1278 ,  G11B5/3146 ,  G11B5/315 ,  G11B5/3169 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A method for manufacturing a write pole for perpendicular magnetic recording for accurately defining a side shield throat height and write pole flare point. The method includes the formation of a magnetic structure that provides an electronic lapping guide as well as providing the structure for both the side shields and the write pole. The magnetic structure includes a write pole portion and first and second side shield portions. The side shields portions are magnetically connected with the write pole portion in a region in front of an intended air hearing surface plane (e.g. in the direction from which lapping will progress). The side shields portions are each separated from the write pole portion in a region behind the intended air bearing surface plane by notches that terminate at a desired location relative to the intended air bearing surface plane and which open up in a region behind the intended air bearing surface plane.

摘要翻译： 一种制造用于垂直磁记录的写磁极的方法，用于准确地限定侧屏蔽喉高度和写磁极点。 该方法包括形成提供电子研磨导轨的磁性结构，以及为侧屏和写极提供结构。 磁性结构包括写极部分和第一和第二侧面屏蔽部分。 侧面屏蔽部分在预期的空气听力表面（例如沿着研磨过程的方向）前面的区域中与写入极部分磁性连接。 侧面屏蔽部分分别与预期的空气支承面平面后面的区域中的写入磁极部分分开，该凹口终止于相对于预期的空气轴承表面平面的期望位置，并且在预期的空气轴承后面的区域中开口 表面。

公开(公告)号：US20080149490A1

公开(公告)日：2008-06-26

申请号：US11645397

申请日：2006-12-26

申请人： Christian R. Bonhote ,  Jeffrey S. Lille ,  Xhavin Sinha

发明人： Christian R. Bonhote ,  Jeffrey S. Lille ,  Xhavin Sinha

IPC分类号： C23C28/00

CPC分类号： C25D5/02 ,  C25D7/123 ,  H01L21/76873 ,  H01L2221/1089

摘要： Methods and structures for the electroplating on ultra-thin seed layers are disclosed. A dual layer structure is utilized, consisting of a thicker, highly conductive layer surrounding device structures. Within the device die, an ultra-thin seed layer is employed, which is electrically coupled to the conduction layer. Using this technique, electroplating of critical device structures can be carefully controlled and made uniform across the full diameter of the wafer. The technique also allow for the deployment of ultra-thin seed layers of varying thickness and composition in different locations within the circuit device, or in different die on the wafer.

摘要翻译： 公开了在超薄种子层上电镀的方法和结构。 使用双层结构，由围绕器件结构的较厚的高导电层组成。 在器件管芯内部，采用超薄种子层，其电耦合到导电层。 使用这种技术，关键器件结构的电镀可以被仔细地控制并在晶片的整个直径上均匀。 该技术还允许在电路装置内的不同位置或晶片上的不同模具中部署不同厚度和组成的超薄种子层。

公开(公告)号：US07950137B2

公开(公告)日：2011-05-31

申请号：US11766711

申请日：2007-06-21

申请人： Christian Rene Bonhote ,  Thomas Dudley Boon, Jr. ,  Ming Jiang ,  Jordan Asher Katine ,  Quang Le ,  Yinshi Liu ,  Xhavin Sinha ,  Sue Siyang Zhang ,  Yi Zheng

发明人： Christian Rene Bonhote ,  Thomas Dudley Boon, Jr. ,  Ming Jiang ,  Jordan Asher Katine ,  Quang Le ,  Yinshi Liu ,  Xhavin Sinha ,  Sue Siyang Zhang ,  Yi Zheng

IPC分类号： G11B5/127 ,  H04R31/00

CPC分类号： G11B5/3166 ,  G11B5/112 ,  G11B5/1278 ,  G11B5/3146 ,  G11B5/315 ,  G11B5/3169 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A method for manufacturing a write pole for perpendicular magnetic recording for accurately defining a side shield throat height and write pole flare point. The magnetic structure includes a write pole portion and first and second side shield portions. The side shields portions are magnetically connected with the write pole portion in a region in front of an intended air bearing surface plane (e.g. in the direction from which lapping will progress). The side shields portions are each separated from the write pole portion in a region behind the intended air bearing surface plane by notches that terminate at a desired location relative to the intended air bearing surface plane and which open up in a region behind the intended air bearing surface plane.

摘要翻译： 一种制造用于垂直磁记录的写磁极的方法，用于准确地限定侧屏蔽喉高度和写磁极点。 磁性结构包括写极部分和第一和第二侧面屏蔽部分。 侧屏蔽部分在预期的空气轴承表面（例如沿着研磨过程的方向）前面的区域中与写入极部分磁性连接。 侧面屏蔽部分分别与预期的空气支承面平面后面的区域中的写入磁极部分分开，该凹口终止于相对于预期的空气轴承表面平面的期望位置，并且在预期的空气轴承后面的区域中开口 表面。