发明申请
- 专利标题: NANOROBOT MODULE, AUTOMATION AND EXCHANGE
- 专利标题(中): NANOROBOT模块,自动化和交换
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申请号: US12596707申请日: 2008-04-24
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公开(公告)号: US20100140473A1公开(公告)日: 2010-06-10
- 发明人: Volker Klocke
- 申请人: Volker Klocke
- 优先权: DE102007019623.9 20070424; DE102007022045.8 20070508; DE102007035761.5 20070727; DE102007035950.2 20070730; DE102007036019.5 20070730
- 国际申请: PCT/DE08/00699 WO 20080424
- 主分类号: G01B21/30
- IPC分类号: G01B21/30 ; G01B21/20 ; G01B5/28 ; G01Q70/00
摘要:
A nanorobot module with a measurement device for the measurement of spatial surface properties with a measurement range in the centimetre range and a resolution in the nanometre range, that can be arranged in a vacuum chamber, for example the vacuum chamber of a microscope. Along with this integration of the nanorobot module into a vacuum chamber, the disclosure further relates to the automation of the module in the chamber system, in particular the connection of the controller of the nanorobot system and the chamber system by the provision of an interface between both systems. Finally, the disclosure relates to a mechatronic exchange adapter for the flexible securing of nanorobot modules within a vacuum chamber, in particular the disclosure relates to an exchange adapter, which preferably in one process electrically connects a nanorobot module and mechanically secures it so that it is guided with high precision and without play.
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