公开(公告)号：US06848328B2

公开(公告)日：2005-02-01

申请号：US10094939

申请日：2002-03-11

申请人： Volker Klocke

发明人： Volker Klocke

IPC分类号： G02B21/32 ,  H02K16/00 ,  H02K41/02 ,  B25J7/00 ,  F16H21/44

CPC分类号： G02B21/32 ,  H02K16/00 ,  H02K41/02 ,  Y10S977/724 ,  Y10T74/18992

摘要： A positioning unit (1) includes an accelerating nanodrive (2), which has a resolution of at least ±10 nm, a slider (5) and a module (6, 7), which has a stationary component (6) and a component (7) movable for this purpose. The component (7) has a mass of less than 500 g and is movably supported relative to the drive (2). The slider (5) and the movable component (7) of the module (6, 7) are securely connected one to the other and the drive (2) can exert accelerations higher than 10 G.

摘要翻译： 定位单元（1）包括具有至少±10nm的分辨率的加速纳米驱动（2），滑块（5）和模块（6,7），其具有静止部件（6）和部件 （7）为此目的可移动。 组件（7）具有小于500g的质量并且相对于驱动器（2）可移动地支撑。 模块（6,7）的滑块（5）和可移动部件（7）彼此牢固地连接，并且驱动器（2）可以施加高于10G的加速度。

公开(公告)号：US20100140473A1

公开(公告)日：2010-06-10

申请号：US12596707

申请日：2008-04-24

申请人： Volker Klocke

发明人： Volker Klocke

IPC分类号： G01B21/30 ,  G01B21/20 ,  G01B5/28 ,  G01Q70/00

CPC分类号： G01Q10/02 ,  G01B21/04 ,  G01Q10/04 ,  G01Q30/04 ,  G01Q30/16 ,  G01Q30/20 ,  H01J37/20 ,  H01J2237/202 ,  H01J2237/2025 ,  H01J2237/20264 ,  H01J2237/20278 ,  H01J2237/20292 ,  H01J2237/204 ,  H01J2237/28

摘要： A nanorobot module with a measurement device for the measurement of spatial surface properties with a measurement range in the centimetre range and a resolution in the nanometre range, that can be arranged in a vacuum chamber, for example the vacuum chamber of a microscope. Along with this integration of the nanorobot module into a vacuum chamber, the disclosure further relates to the automation of the module in the chamber system, in particular the connection of the controller of the nanorobot system and the chamber system by the provision of an interface between both systems. Finally, the disclosure relates to a mechatronic exchange adapter for the flexible securing of nanorobot modules within a vacuum chamber, in particular the disclosure relates to an exchange adapter, which preferably in one process electrically connects a nanorobot module and mechanically secures it so that it is guided with high precision and without play.

摘要翻译： 一种具有用于测量空间表面性质的测量装置的纳米机器人模块，其具有在厘米范围内的测量范围和在纳米范围内的分辨率，其可以布置在真空室中，例如显微镜的真空室中。 随着将纳米机器人模块集成到真空室中，本发明还涉及腔室系统中的模块的自动化，特别是通过提供纳米机器人系统的控制器与腔室系统之间的界面的连接 两个系统。 最后，本公开涉及一种用于在真空室内柔性固定纳米机架模块的机电一体式交换适配器，特别地，本公开涉及一种交换适配器，其优选地在一个过程中电连接纳米机架模块并机械地固定它，使得它是 引导精准，无间隙。