发明申请
US20100144103A1 Method, System and Apparatus for Gating Configurations and Improved Contacts in Nanowire-Based Electronic Devices
有权
基于纳米线的电子设备中门控配置和改进接点的方法,系统和设备
- 专利标题: Method, System and Apparatus for Gating Configurations and Improved Contacts in Nanowire-Based Electronic Devices
- 专利标题(中): 基于纳米线的电子设备中门控配置和改进接点的方法,系统和设备
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申请号: US12703043申请日: 2010-02-09
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公开(公告)号: US20100144103A1公开(公告)日: 2010-06-10
- 发明人: Shahriar Mostarshed , Jian Chen , Francisco Leon , Yaoling Pan , Linda T. Romano
- 申请人: Shahriar Mostarshed , Jian Chen , Francisco Leon , Yaoling Pan , Linda T. Romano
- 申请人地址: US CA Palo Alto
- 专利权人: NANOSYS, INC.
- 当前专利权人: NANOSYS, INC.
- 当前专利权人地址: US CA Palo Alto
- 主分类号: H01L21/8232
- IPC分类号: H01L21/8232 ; H01L21/302
摘要:
Methods, systems, and apparatuses for electronic devices having improved gate structures are described. An electronic device includes at least one nanowire. A gate contact is positioned along at least a portion of a length of the at least one nanowire. A dielectric material layer is between the gate contact and the at least one nanowire. A source contact and a drain contact are in contact with the at least one nanowire. At least a portion of the source contact and/or the drain contact overlaps with the gate contact along the nanowire the length. In another aspect, an electronic device includes a nanowire having a semiconductor core surrounded by an insulating shell layer. A ring shaped first gate region surrounds the nanowire along a portion of the length of the nanowire. A second gate region is positioned along the length of the nanowire between the nanowire and the substrate. A source contact and a drain contact are coupled to the semiconductor core of the nanowire at respective exposed portions of the semiconductor core.
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