发明申请
- 专利标题： ANTIREFLECTIVE COATING COMPOSITIONS
- 专利标题（中）： 抗反射涂料组合物
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申请号： US12332501申请日： 2008-12-11
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公开(公告)号： US20100151392A1公开(公告)日： 2010-06-17
- 发明人: M. Dalil Rahman , Yi Yi , Douglas McKenzie , Clement Anyadiegwu , Ping-Hung Lu
- 申请人： M. Dalil Rahman , Yi Yi , Douglas McKenzie , Clement Anyadiegwu , Ping-Hung Lu
- 主分类号： G03F7/20
- IPC分类号： G03F7/20 ; C08L83/06
摘要：
The present invention relates to an organic spin coatable antireflective coating composition comprising a polymer, a linking component, a crosslinker, and an acid generator. The invention further relates to a process for imaging the present composition.
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