发明申请
- 专利标题: Non-volatile memory device and method of fabricating the same
- 专利标题(中): 非易失性存储器件及其制造方法
-
申请号: US12654470申请日: 2009-12-22
-
公开(公告)号: US20100155826A1公开(公告)日: 2010-06-24
- 发明人: Xianyu Wenxu , Jung-hyun Lee , Dong-joon Ma , Yeon-hee Kim , Yong-young Park , Chang-soo Lee
- 申请人: Xianyu Wenxu , Jung-hyun Lee , Dong-joon Ma , Yeon-hee Kim , Yong-young Park , Chang-soo Lee
- 优先权: KR10-2008-0130383 20081219
- 主分类号: H01L27/115
- IPC分类号: H01L27/115 ; H01L21/8246 ; H01L21/20
摘要:
Provided are a non-volatile memory device and a method of fabricating the same. The non-volatile memory device may include a substrate and a plurality of semiconductor pillars on the substrate. A plurality of control gate electrodes may be stacked on the substrate and intersecting the plurality of semiconductor pillars. A plurality of dummy electrodes may be stacked adjacent to the plurality of control gate electrodes on the substrate, the plurality of dummy electrodes being spaced apart from the plurality of control gate electrodes. A plurality of via plugs may be connected to the plurality of control gate electrodes. A plurality of wordlines may be on the plurality of via plugs. Each of the plurality of via plugs may penetrate a corresponding one of the plurality of control gate electrodes and at least one of the plurality of dummy electrodes.
公开/授权文献
信息查询
IPC分类: