发明申请
- 专利标题: SEMICONDUCTOR MEMORY DEVICE AND METHOD OF FABRICATING THE SAME
- 专利标题(中): 半导体存储器件及其制造方法
-
申请号: US12715964申请日: 2010-03-02
-
公开(公告)号: US20100159657A1公开(公告)日: 2010-06-24
- 发明人: Fumitaka ARAI , Riichiro Shirota , Makoto Mizukami
- 申请人: Fumitaka ARAI , Riichiro Shirota , Makoto Mizukami
- 申请人地址: JP Tokyo
- 专利权人: KABUSHIKI KAISHA TOSHIBA
- 当前专利权人: KABUSHIKI KAISHA TOSHIBA
- 当前专利权人地址: JP Tokyo
- 优先权: JP2005-379017 20051228
- 主分类号: H01L21/336
- IPC分类号: H01L21/336
摘要:
A semiconductor memory device includes: a semiconductor substrate, on which an impurity diffusion layer is formed in a cell array area; a gate wiring stack body formed on the cell array area, in which multiple gate wirings are stacked and separated from each other with insulating films; a gate insulating film formed on the side surface of the gate wiring stack body, in which an insulating charge storage layer is contained; pillar-shaped semiconductor layers arranged along the gate wiring stack body, one side surfaces of which are opposed to the gate wiring stack body via the gate insulating film, each pillar-shaped semiconductor layer having the same conductivity type as the impurity diffusion layer; and data lines formed to be in contact with the upper surfaces of the pillar-shaped semiconductor layers and intersect the gate wirings.
公开/授权文献
信息查询
IPC分类: