发明申请
US20100159657A1 SEMICONDUCTOR MEMORY DEVICE AND METHOD OF FABRICATING THE SAME 失效
半导体存储器件及其制造方法

SEMICONDUCTOR MEMORY DEVICE AND METHOD OF FABRICATING THE SAME
摘要:
A semiconductor memory device includes: a semiconductor substrate, on which an impurity diffusion layer is formed in a cell array area; a gate wiring stack body formed on the cell array area, in which multiple gate wirings are stacked and separated from each other with insulating films; a gate insulating film formed on the side surface of the gate wiring stack body, in which an insulating charge storage layer is contained; pillar-shaped semiconductor layers arranged along the gate wiring stack body, one side surfaces of which are opposed to the gate wiring stack body via the gate insulating film, each pillar-shaped semiconductor layer having the same conductivity type as the impurity diffusion layer; and data lines formed to be in contact with the upper surfaces of the pillar-shaped semiconductor layers and intersect the gate wirings.
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