发明申请
US20100170888A1 MICRO HEATER, METHOD OF FABRICATING THE SAME AND ENVIRONMENT SENSOR USING THE SAME
审中-公开
微型加热器，其制造方法和使用其的环境传感器
- 专利标题： MICRO HEATER, METHOD OF FABRICATING THE SAME AND ENVIRONMENT SENSOR USING THE SAME
- 专利标题（中）： 微型加热器，其制造方法和使用其的环境传感器
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申请号： US12547375申请日： 2009-08-25
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公开(公告)号： US20100170888A1公开(公告)日： 2010-07-08
- 发明人: Hong Yeol LEE , Seung Eon Moon , Jong Hyurk Park , Jun Hyuk Kwak , So Jeong Park , Kang Ho Park , Jong Dae Kim
- 申请人： Hong Yeol LEE , Seung Eon Moon , Jong Hyurk Park , Jun Hyuk Kwak , So Jeong Park , Kang Ho Park , Jong Dae Kim
- 申请人地址： KR Daejeon
- 专利权人： Electronics and Telecommunications Research Institute
- 当前专利权人： Electronics and Telecommunications Research Institute
- 当前专利权人地址： KR Daejeon
- 主分类号： H05B3/02
- IPC分类号： H05B3/02 ; H01C17/02 ; G01K13/00
摘要：
Provided is a micro heater, which includes an elastic thin film formed by sequentially depositing a first silicon oxide layer, a silicon nitride layer and a second silicon oxide layer, a heating part, a heat spreading structure and a heating part electrode, which are patterned on the elastic thin film, and an insulating layer formed on the heating part, the heat spreading structure and the heating part electrode. Here, the heat spreading structure is perpendicularly connected to the heating part at a connection portion.