摘要:
Provided is a micro heater, which includes an elastic thin film formed by sequentially depositing a first silicon oxide layer, a silicon nitride layer and a second silicon oxide layer, a heating part, a heat spreading structure and a heating part electrode, which are patterned on the elastic thin film, and an insulating layer formed on the heating part, the heat spreading structure and the heating part electrode. Here, the heat spreading structure is perpendicularly connected to the heating part at a connection portion.