发明申请
- 专利标题: NON-VOLATILE MEMORY DEVICE AND METHOD OF FABRICATING THE SAME
- 专利标题(中): 非易失性存储器件及其制造方法
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申请号: US12650367申请日: 2009-12-30
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公开(公告)号: US20100171166A1公开(公告)日: 2010-07-08
- 发明人: Woong Lee , Jung-Yoon Ko , Sang-Kyoung Lee , Ho-Min Son , Won-Jun Jang , Jung-geun Jee
- 申请人: Woong Lee , Jung-Yoon Ko , Sang-Kyoung Lee , Ho-Min Son , Won-Jun Jang , Jung-geun Jee
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 优先权: KR10-2009-0000438 20090105
- 主分类号: H01L29/788
- IPC分类号: H01L29/788
摘要:
A non-volatile memory device and a method of fabricating the same are provided. The method can include disposing an isolation layer on a semiconductor substrate. The isolation layer may protrude from the main surface of the semiconductor substrate and define an active region. In a recess defined by the protrusion of the isolation layer and the active region, a diffusion-retarding poly pattern and a floating gate may be formed in sequence. A control gate may be disposed on the isolation layer to cover the diffusion-retarding poly pattern and the floating gate.
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