发明申请
US20100173440A1 Nozzle-Based, Vapor-Phase, Plume Delivery Structure for Use in Production of Thin-Film Deposition Layer
审中-公开
喷嘴为基础,蒸气相,用于生产薄膜沉积层的羽流输送结构
- 专利标题: Nozzle-Based, Vapor-Phase, Plume Delivery Structure for Use in Production of Thin-Film Deposition Layer
- 专利标题(中): 喷嘴为基础,蒸气相,用于生产薄膜沉积层的羽流输送结构
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申请号: US12466981申请日: 2009-05-15
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公开(公告)号: US20100173440A1公开(公告)日: 2010-07-08
- 发明人: Robert W. Birkmire , Gregory M. Hanket , T.W. Fraser Russell , Erten Eser
- 申请人: Robert W. Birkmire , Gregory M. Hanket , T.W. Fraser Russell , Erten Eser
- 申请人地址: US DE Newark
- 专利权人: University of Delaware
- 当前专利权人: University of Delaware
- 当前专利权人地址: US DE Newark
- 主分类号: H01L31/18
- IPC分类号: H01L31/18
摘要:
A physical vapor deposition effusion method comprising translating a strip material through a physical vapor deposition zone in a deposition chamber and providing first and second substantially closed vessels located serially along the processing path in the same deposition chamber, each vessel emitting different source materials to produce overlapping plumes and having an array of vapor delivery nozzles distributed uniformly across the vessel along the width of the zone, and configured to expel overlapping plumes to create a fog having a substantially uniform composition across the width and a varying composition across the length of the zone. Also, an elongate vapor deposition effusion vessel having an elongate lid including plural nozzles spaced from each other along its elongate axis, and a continuous heating element in the lid encircling the plural nozzles, the heating element having electrical contacts connected to an electrical source on the same side of the vessel.
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