公开(公告)号：US20120156372A1

公开(公告)日：2012-06-21

申请号：US13006086

申请日：2011-01-13

申请人： Robert W. Birkmire ,  Gregory M. Hanket ,  T.W. Fraser Russell ,  Erten Eser

发明人： Robert W. Birkmire ,  Gregory M. Hanket ,  T.W. Fraser Russell ,  Erten Eser

IPC分类号： C23C16/44

CPC分类号： C23C14/562 ,  C23C14/0021 ,  C23C14/0623 ,  C23C14/24 ,  C23C14/243 ,  C23C14/548 ,  H01L21/02554 ,  H01L21/02568 ,  H01L21/02631 ,  H01L31/0749 ,  Y02E10/541 ,  Y02P70/521

摘要： A physical vapor deposition effusion method comprising translating a strip material through a physical vapor deposition zone in a deposition chamber and providing first and second substantially closed vessels located serially along the processing path in the same deposition chamber, each vessel emitting different source materials to produce overlapping plumes and having an array of vapor delivery nozzles distributed uniformly across the vessel along the width of the zone, and configured to expel overlapping plumes to create a fog having a substantially uniform composition across the width and a varying composition across the length of the zone. Also, an elongate vapor deposition effusion vessel having an elongate lid including plural nozzles spaced from each other along its elongate axis, and a continuous heating element in the lid encircling the plural nozzles, the heating element having electrical contacts connected to an electrical source on the same side of the vessel.

摘要翻译： 一种物理气相沉积渗出方法，包括将条状材料平移通过沉积室中的物理气相沉积区，并提供沿同一沉积室中的处理路径串联设置的第一和第二基本上密封的容器，每个容器发射不同的源材料以产生重叠 羽流并且具有沿着该区域的宽度均匀地分布在该容器上的蒸气输送喷嘴的阵列，并且被配置为排出重叠的羽流以产生具有穿过该宽度的基本上均匀的组成的雾和跨越该区域长度的变化的组合。 另外，细长的气相沉积容器具有细长的盖子，其细长的盖子包括沿着其细长轴线彼此分开的多个喷嘴，以及围绕多个喷嘴的盖子中的连续的加热元件，加热元件具有电连接到电源 船的同一侧。

公开(公告)号：US20100173440A1

公开(公告)日：2010-07-08

申请号：US12466981

申请日：2009-05-15

申请人： Robert W. Birkmire ,  Gregory M. Hanket ,  T.W. Fraser Russell ,  Erten Eser

发明人： Robert W. Birkmire ,  Gregory M. Hanket ,  T.W. Fraser Russell ,  Erten Eser

IPC分类号： H01L31/18

CPC分类号： C23C14/562 ,  C23C14/0021 ,  C23C14/0623 ,  C23C14/24 ,  C23C14/243 ,  C23C14/548 ,  H01L21/02554 ,  H01L21/02568 ,  H01L21/02631 ,  H01L31/0749 ,  Y02E10/541 ,  Y02P70/521

摘要： A physical vapor deposition effusion method comprising translating a strip material through a physical vapor deposition zone in a deposition chamber and providing first and second substantially closed vessels located serially along the processing path in the same deposition chamber, each vessel emitting different source materials to produce overlapping plumes and having an array of vapor delivery nozzles distributed uniformly across the vessel along the width of the zone, and configured to expel overlapping plumes to create a fog having a substantially uniform composition across the width and a varying composition across the length of the zone. Also, an elongate vapor deposition effusion vessel having an elongate lid including plural nozzles spaced from each other along its elongate axis, and a continuous heating element in the lid encircling the plural nozzles, the heating element having electrical contacts connected to an electrical source on the same side of the vessel.

摘要翻译： 一种物理气相沉积渗出方法，包括将条状材料平移通过沉积室中的物理气相沉积区，并提供沿同一沉积室中的处理路径串联设置的第一和第二基本封闭的容器，每个容器发射不同的源材料以产生重叠 羽流并且具有沿着该区域的宽度均匀地分布在该容器上的蒸气输送喷嘴的阵列，并且被配置为排出重叠的羽流以产生具有穿过该宽度的基本上均匀的组成的雾和跨越该区域长度的变化的组合。 另外，细长的气相沉积容器具有细长的盖子，其细长的盖子包括沿着其细长轴线彼此分开的多个喷嘴，以及围绕多个喷嘴的盖子中的连续的加热元件，加热元件具有电连接到电源 船的同一侧。

公开(公告)号：US06676994B2

公开(公告)日：2004-01-13

申请号：US09819277

申请日：2001-03-28

申请人： Robert W. Birkmire ,  Erten Eser ,  Gregory M. Hanket ,  Brian E. McCandless

发明人： Robert W. Birkmire ,  Erten Eser ,  Gregory M. Hanket ,  Brian E. McCandless

IPC分类号： C23C1600

CPC分类号： C23C14/228 ,  C23C14/0629 ,  C23C14/0694

摘要： Thin films are produced by a method wherein a material is heated in a furnace placed inside a vacuum system. An inert gas is flown over/through the heated material. The vapors of the material are entrained in the carrier gas which is then directed onto a substrate heated to a temperature below that of the furnace temperature and placed in close proximity to the exit of the furnace.

摘要翻译： 通过一种方法制造薄膜，其中将材料在放置在真空系统内的炉中加热。 惰性气体流过/通过加热的材料。 材料的蒸气被夹带在载气中，然后将其引导到加热到低于炉温的温度的基底上，并放置在靠近炉的出口处。

公开(公告)号：US06982005B2

公开(公告)日：2006-01-03

申请号：US10435637

申请日：2003-05-09

申请人： Erten Eser ,  Gregory M. Hanket

发明人： Erten Eser ,  Gregory M. Hanket

IPC分类号： C23C14/24

CPC分类号： C23C14/243

摘要： A multiple nozzle thermal evaporation source includes a plurality of nozzles having a tapered shape. The nozzles may comprise a thermally conductive material having a low emissivity material.

公开(公告)号：US06562405B2

公开(公告)日：2003-05-13

申请号：US10234604

申请日：2002-09-04

申请人： Erten Eser ,  Gregory M. Hanket

发明人： Erten Eser ,  Gregory M. Hanket

IPC分类号： C23C1400

CPC分类号： C23C14/243

摘要： A multiple nozzle thermal evaporation source includes a plurality of nozzles having a tapered shape. The nozzles may be coated with a thermally conductive material with a low emissivity material.

摘要翻译： 多喷嘴热蒸发源包括具有锥形形状的多个喷嘴。 喷嘴可以涂覆有具有低辐射率材料的导热材料。

公开(公告)号：US06372538B1

公开(公告)日：2002-04-16

申请号：US09527316

申请日：2000-03-16

申请人： Robert G. Wendt ,  Gregory M. Hanket ,  Robert W. Birkmire ,  T. W. Fraser Russell ,  Scott Wiedeman

发明人： Robert G. Wendt ,  Gregory M. Hanket ,  Robert W. Birkmire ,  T. W. Fraser Russell ,  Scott Wiedeman

IPC分类号： H01L2100

CPC分类号： H01L31/0749 ,  H01L31/0322 ,  Y02E10/541 ,  Y02P70/521

摘要： A new, large-area, thin-film, flexible photovoltaic structure is disclosed, as well as a general fabrication procedure, including a preferably roll-to-roll-type, process-chamber-segregated, “continuous-motion”, method for producing such a structure. A special multi-material vapor-deposition environment is disclosed to implement an important co-evaporation, layer-deposition procedure performed in and as part of the fabrication procedure. A structural system adapted to create a vapor environment generally like that just referred to is disclosed, as is an organization of method steps involved in the generation of such a vapor environment. Also, a unique, vapor-creating, materials-distributing system, which includes specially designed heated crucibles with carefully arranged, spatially distributed, localized and generally point-like, heated-nozzle sources of different metallic vapors, and a special multi-fingered, comb-like, vapor-delivering manifold structure is shown.

摘要翻译： 公开了一种新的，大面积的薄膜柔性光伏结构，以及一般的制造程序，包括优选的卷对卷型，工艺室分离的“连续运动”方法 生产这样的结构。 公开了一种特殊的多材料蒸气沉积环境，以实现在制造过程中和作为制造过程的一部分中执行的重要的共蒸镀层沉积程序。 公开了适于产生通常类似于刚刚提及的蒸气环境的结构系统，以及涉及产生这种蒸气环境的方法步骤的组织。 另外，一种独特的蒸气创造的材料分配系统，其中包括专门设计的加热坩埚，精心布置，空间分布，局部和大体上点状的不同金属蒸气的加热喷嘴源，以及特殊的多指， 梳状，蒸汽输送歧管结构。

公开(公告)号：US06310281B1

公开(公告)日：2001-10-30

申请号：US09527542

申请日：2000-03-16

申请人： Robert G. Wendt ,  Gregory M. Hanket ,  Robert W. Birkmire ,  T. W. Fraser Russell ,  Scott Wiedeman

发明人： Robert G. Wendt ,  Gregory M. Hanket ,  Robert W. Birkmire ,  T. W. Fraser Russell ,  Scott Wiedeman

IPC分类号： H01L3104

CPC分类号： H01L31/03928 ,  C23C14/0623 ,  C23C14/562 ,  H01L31/0392 ,  H01L31/03925 ,  H01L31/046 ,  H01L31/0463 ,  H01L31/0465 ,  H01L31/0749 ,  H01L31/1836 ,  H01L31/1876 ,  Y02E10/541 ,  Y02P70/521

摘要： A new, large-area, thin-film, flexible photovoltaic structure is disclosed, as well as a general fabrication procedure, including a preferably roll-to-roll-type, process-chamber-segregated, “continuous-motion”, method for producing such a structure. A special multi-material vapor-deposition environment is disclosed to implement an important co-evaporation, layer-deposition procedure performed in and as part of the fabrication procedure. A structural system adapted to create a vapor environment generally like that just referred to is disclosed, as is an organization of method steps involved in the generation of such a vapor environment. Also, a unique, vapor-creating, materials-distributing system, which includes specially designed heated crucibles with carefully arranged, spatially distributed, localized and generally point-like, heated-nozzle sources of different metallic vapors, and a special multi-fingered, comb-like, vapor-delivering manifold structure is shown.

摘要翻译： 公开了一种新的，大面积的薄膜柔性光伏结构，以及一般的制造程序，包括优选的卷对卷型，工艺室分离的“连续运动”方法 生产这样的结构。 公开了一种特殊的多材料蒸气沉积环境，以实现在制造过程中和作为制造过程的一部分中执行的重要的共蒸镀层沉积程序。 公开了适于产生通常类似于刚刚提及的蒸气环境的结构系统，以及涉及产生这种蒸气环境的方法步骤的组织。 另外，一种独特的蒸气创造的材料分配系统，其中包括专门设计的加热坩埚，精心布置，空间分布，局部和大体上点状的不同金属蒸气的加热喷嘴源，以及特殊的多指， 梳状，蒸汽输送歧管结构。

公开(公告)号：US08986455B2

公开(公告)日：2015-03-24

申请号：US12250172

申请日：2008-10-13

申请人： Robert W. Birkmire ,  Gregory M. Hanket

发明人： Robert W. Birkmire ,  Gregory M. Hanket

IPC分类号： C23C16/00 ,  C23C14/24

CPC分类号： F27B14/00 ,  C23C14/243

摘要： A thermal evaporation source includes: a crucible configured to contain a volume of evaporant and a vapor space above the evaporant; a manifold body having within it a hollow expansion chamber that is flowably connected to the vapor space via one or more restriction orifices; one or more effusion nozzles flowably connected to the expansion chamber and exiting an outer surface of the thermal evaporation source, the nozzle(s) oriented to direct an evaporant vapor flow out of the source vertically downward, in one or more horizontal directions, or in one or more directions intermediate between horizontal and vertically downward; and a heater capable of heating some or all of the thermal evaporation source to a temperature sufficient to produce the one or more evaporant vapor flows when a vacuum is applied to the thermal evaporation source.

摘要翻译： 热蒸发源包括：坩埚，其构造成容纳蒸发剂的体积和蒸发器上方的蒸汽空间; 歧管主体，在其内部具有中空膨胀室，其经由一个或多个限制孔流动地连接到蒸气空间; 一个或多个渗出喷嘴可流动地连接到膨胀室并离开热蒸发源的外表面，喷嘴被定向成将蒸发蒸气流沿垂直向下的一个或多个水平方向引导出源，或者在 在水平和垂直向下之间中间的一个或多个方向; 以及当将真空加到热蒸发源上时能够将部分或全部热蒸发源加热到足以产生一个或多个蒸发蒸气流的温度的加热器。

公开(公告)号：US20090095213A1

公开(公告)日：2009-04-16

申请号：US12250172

申请日：2008-10-13

申请人： Robert W. Birkmire ,  Gregory M. Hanket

发明人： Robert W. Birkmire ,  Gregory M. Hanket

IPC分类号： C23C14/24

CPC分类号： F27B14/00 ,  C23C14/243

摘要： A thermal evaporation source includes: a crucible configured to contain a volume of evaporant and a vapor space above the evaporant; a manifold body having within it a hollow expansion chamber that is flowably connected to the vapor space via one or more restriction orifices; one or more effusion nozzles flowably connected to the expansion chamber and exiting an outer surface of the thermal evaporation source, the nozzle(s) oriented to direct an evaporant vapor flow out of the source vertically downward, in one or more horizontal directions, or in one or more directions intermediate between horizontal and vertically downward; and a heater capable of heating some or all of the thermal evaporation source to a temperature sufficient to produce the one or more evaporant vapor flows when a vacuum is applied to the thermal evaporation source.

摘要翻译： 热蒸发源包括：坩埚，其构造成容纳蒸发剂的体积和蒸发器上方的蒸汽空间; 歧管主体，在其内部具有中空膨胀室，其经由一个或多个限制孔流动地连接到蒸气空间; 一个或多个渗出喷嘴可流动地连接到膨胀室并离开热蒸发源的外表面，喷嘴被定向成将蒸发蒸气流沿垂直向下的一个或多个水平方向引导出源，或者在 在水平和垂直向下之间中间的一个或多个方向; 以及当将真空加到热蒸发源上时能够将部分或全部热蒸发源加热到足以产生一个或多个蒸发蒸气流的温度的加热器。

公开(公告)号：US20090291281A1

公开(公告)日：2009-11-26

申请号：US11795725

申请日：2006-01-20

申请人： Gregory M. Hanket

发明人： Gregory M. Hanket

IPC分类号： B32B5/02 ,  B32B27/04 ,  B29C55/02

CPC分类号： B32B27/20 ,  C08J5/18 ,  C08J2379/08 ,  H05K1/0346 ,  H05K1/0373 ,  H05K1/0393 ,  H05K2201/0141 ,  H05K2201/0154 ,  H05K2201/0245 ,  H05K2201/0251 ,  Y10T428/268

摘要： The present invention comprises microfiller-reinforced polymer films. Microfiller-reinforced polymer films are films having high aspect-ratio fillers incorporated therewith, which filler have a minor dimension less that 20 μm and a major dimension at least three times greater than the minor dimension.

摘要翻译： 本发明包括微细纤维增强聚合物膜。 微填料增强聚合物膜是具有掺入其中的高纵横比填料的膜，该填料具有小于20μm的小尺寸和小尺寸至少小于次要尺寸的三倍。