Invention Application
- Patent Title: MICROMECHANICAL COMPONENT AND METHOD FOR PRODUCING A MICROMECHANICAL COMPONENT
- Patent Title (中): 微生物组分和生产微生物组分的方法
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Application No.: US12451315Application Date: 2008-05-26
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Publication No.: US20100176469A1Publication Date: 2010-07-15
- Inventor: Peter Schmollngruber , Hans Artmann , Thomas Wagner
- Applicant: Peter Schmollngruber , Hans Artmann , Thomas Wagner
- Priority: DE102007026445.5 20070606
- International Application: PCT/EP2008/056398 WO 20080526
- Main IPC: H01L29/84
- IPC: H01L29/84 ; H01L21/302
Abstract:
A micromechanical component includes a substrate that has a front side and a backside, the front side having a functional pattern, which functional pattern is electrically contacted to the backside in a contact region. The substrate has at least one contact hole in the contact region, which extends into the substrate, starting from the backside.
Public/Granted literature
- US08076739B2 Micromechanical component and method for producing a micromechanical component Public/Granted day:2011-12-13
Information query
IPC分类:
