发明申请
- 专利标题： APPARATUS AND METHOD FOR SEGMENTING EDGES FOR OPTICAL PROXIMITY CORRECTION
- 专利标题（中）： 用于光学近似校正的边缘分割装置和方法
-
申请号： US12690791申请日： 2010-01-20
-
公开(公告)号： US20100186000A1公开(公告)日： 2010-07-22
- 发明人: ABDURRAHMAN SEZGINER , Bayram Yenikaya , Hsu-Ting Huang
- 申请人： ABDURRAHMAN SEZGINER , Bayram Yenikaya , Hsu-Ting Huang
- 主分类号： G06F17/50
- IPC分类号： G06F17/50
摘要：
An apparatus and method for modifying a mask data set includes calculating a derivative of a figure-of-merit, indicative of a data set defined by a plurality of polygon edges and then segmenting polygon edges in response to said step of calculating.
公开/授权文献
信息查询
