发明申请
- 专利标题: ASHING DEVICE
- 专利标题(中): ASHING设备
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申请号: US12443912申请日: 2008-10-29
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公开(公告)号: US20100193131A1公开(公告)日: 2010-08-05
- 发明人: Masahisa Ueda , Takashi Kurimoto , Kyuzo Nakamura , Koukou Suu , Toshiya Yogo , Kazushige Komatsu , Nobusuke Tachibana
- 申请人: Masahisa Ueda , Takashi Kurimoto , Kyuzo Nakamura , Koukou Suu , Toshiya Yogo , Kazushige Komatsu , Nobusuke Tachibana
- 申请人地址: JP KANAGAWA
- 专利权人: ULVAC, INC.
- 当前专利权人: ULVAC, INC.
- 当前专利权人地址: JP KANAGAWA
- 优先权: JP2007-287341 20071105
- 国际申请: PCT/JP2008/069681 WO 20081029
- 主分类号: C23F1/08
- IPC分类号: C23F1/08
摘要:
An ashing device that prevents the ashing rate from changing over time. The ashing device ashes organic material on a substrate including an exposed metal in a processing chamber. The ashing device includes a path, which is formed in the processing chamber and through which active species supplied to the processing chamber pass. The path is defined by a surface on which the metal scattered from the substrate by the active species is collectible, with the surface being formed so as to expose a metal that is of the same kind.