发明申请
- 专利标题: SEMICONDUCTOR MEMORY DEVICE INCLUDING FERROELECTRIC FILM AND A METHOD FOR FABRICATING THE SAME
- 专利标题(中): 包含电磁膜的半导体存储器件及其制造方法
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申请号: US12689164申请日: 2010-01-18
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公开(公告)号: US20100193849A1公开(公告)日: 2010-08-05
- 发明人: Jun NISHIMURA , Yoshinori KUMURA , Hiroyuki KANAYA , Tohru OZAKI
- 申请人: Jun NISHIMURA , Yoshinori KUMURA , Hiroyuki KANAYA , Tohru OZAKI
- 申请人地址: JP Tokyo
- 专利权人: KABUSHIKI KAISHA TOSHIBA
- 当前专利权人: KABUSHIKI KAISHA TOSHIBA
- 当前专利权人地址: JP Tokyo
- 优先权: JP2009-025390 20090205
- 主分类号: H01L27/108
- IPC分类号: H01L27/108 ; H01L21/8242
摘要:
According to one embodiment, a semiconductor memory device having a ferroelectric film, includes a semiconductor substrate, a field effect transistor formed on the semiconductor substrate, an inter-layer insulating film formed on the field effect transistor and the semiconductor substrate, a plug constituted with a single-crystalline structure, the plug being formed in the inter-layer insulating film and being connected with a source or a drain of the field effect transistor, a lower electrode constituted with a single-crystalline structure formed on the plug, a ferroelectric film formed on the lower electrode an upper electrode formed on the ferroelectric film.