发明申请
- 专利标题: Vertical cavity surface emitting laser and method of manufacturing thereof
- 专利标题(中): 垂直腔面发射激光器及其制造方法
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申请号: US12656166申请日: 2010-01-20
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公开(公告)号: US20100202486A1公开(公告)日: 2010-08-12
- 发明人: Yuji Masui , Takahiro Arakida , Terukazu Naruse , Rintaro Koda , Naoki Jogan
- 申请人: Yuji Masui , Takahiro Arakida , Terukazu Naruse , Rintaro Koda , Naoki Jogan
- 申请人地址: JP Tokyo
- 专利权人: Sony Corporation
- 当前专利权人: Sony Corporation
- 当前专利权人地址: JP Tokyo
- 优先权: JP2009-026675 20090206
- 主分类号: H01S5/026
- IPC分类号: H01S5/026 ; H01L33/48
摘要:
A vertical cavity surface emitting laser capable of reducing parasitic capacitance while suppressing power consumption, and a method of manufacturing thereof are provided. The vertical cavity surface emitting laser includes a columnar mesa including, on a substrate, a first multilayer reflector, an active layer, and a second multilayer reflector in order from the substrate side, and also including a current narrowing layer. The columnar portion of the mesa including the active layer and the current narrowing layer is formed within a region opposed to the first multilayer reflector and a region opposed to the second multilayer reflector, and a cross section area of the columnar portion is smaller than a cross section area of the second multilayer reflector.