发明申请
- 专利标题: PATTERN MEASUREMENT APPARATUS
- 专利标题(中): 图案测量装置
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申请号: US12763710申请日: 2010-04-20
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公开(公告)号: US20100202654A1公开(公告)日: 2010-08-12
- 发明人: Ryoichi MATSUOKA , Akihiro Onizawa , Akiyuki Sugiyama , Hidetoshi Morokuma , Yasutaka Toyoda
- 申请人: Ryoichi MATSUOKA , Akihiro Onizawa , Akiyuki Sugiyama , Hidetoshi Morokuma , Yasutaka Toyoda
- 申请人地址: JP Tokyo
- 专利权人: HITACHI HIGH-TECHNOLOGIES CORPORATION
- 当前专利权人: HITACHI HIGH-TECHNOLOGIES CORPORATION
- 当前专利权人地址: JP Tokyo
- 优先权: JP2007-207344 20070809
- 主分类号: G06K9/00
- IPC分类号: G06K9/00
摘要:
Mutual compatibility is established between the measurement with a high magnification and the measurement in a wide region. A pattern measurement apparatus is proposed which adds identification information to each of fragments that constitute a pattern within an image obtained by the SEM, and which stores the identification information in a predetermined storage format. Here, the identification information is added to each fragment for distinguishing between one fragment and another fragment. According to the above-described configuration, it turns out that the identification information is added to each fragment on the SEM image which has possessed no specific identification information originally. As a result, it becomes possible to implement the SEM-image management based on the identification information.
公开/授权文献
- US08445871B2 Pattern measurement apparatus 公开/授权日:2013-05-21
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