发明申请
- 专利标题： Substrate treatment apparatus
- 专利标题（中）： 基板处理装置
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申请号： US12656123申请日： 2010-01-19
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公开(公告)号： US20100204821A1公开(公告)日： 2010-08-12
- 发明人: Wataru Tsukinoki
- 申请人： Wataru Tsukinoki
- 申请人地址： JP Tokyo
- 专利权人： Tokyo Electron Limited
- 当前专利权人： Tokyo Electron Limited
- 当前专利权人地址： JP Tokyo
- 优先权： JP2009-028647 20090210
- 主分类号： H01L21/677
- IPC分类号： H01L21/677
摘要：
The invention controls a carrier moving and mounting device such that at normal time, the device moves and mounts carriers in sequence to a delivery mounting units according to a carry-in order, and when a priority carrier is carried into the carry-in mounting unit and if all of the delivery mounting units are occupied by the carriers, the device moves and mounts one of the carriers on the retreat mounting unit, and mounts the priority carrier on the delivery mounting unit which has become vacant by the movement; and controls a delivery device such that at normal time, the delivery device carries the substrates out of the carriers according to the carry-in order of the carriers mounted on the delivery mounting units, and when the priority carrier is mounted, the delivery device carries out the substrates in the priority carrier before the substrates in the other carriers.
公开/授权文献
- US08219233B2 Substrate treatment apparatus 公开/授权日：2012-07-10
信息查询
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