发明申请
- 专利标题: THREE-DIMENSIONAL SEMICONDUCTOR STRUCTURE AND METHOD OF FABRICATING THE SAME
- 专利标题(中): 三维半导体结构及其制造方法
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申请号: US12372860申请日: 2009-02-18
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公开(公告)号: US20100208503A1公开(公告)日: 2010-08-19
- 发明人: Ming-Chang Kuo
- 申请人: Ming-Chang Kuo
- 申请人地址: TW Hsinchu
- 专利权人: MACRONIX INTERNATIONAL CO., LTD.
- 当前专利权人: MACRONIX INTERNATIONAL CO., LTD.
- 当前专利权人地址: TW Hsinchu
- 主分类号: G11C5/02
- IPC分类号: G11C5/02 ; H01L21/00 ; H01L21/4763 ; H01L23/52
摘要:
A three-dimensional (3D) semiconductor structure with high density and method of fabricating the same are disclosed. The 3D semiconductor structure comprises at least a first memory cell and a second memory cell stacked on the first memory cell. The first memory cell comprises a first conductive line and a second conductive line. The second memory cell comprises another first conductive line opposite to the first conductive line of the first memory cell, and the second conductive line formed between said two first conductive lines of the first and second memory cells. The first and second memory cells share the second conductive line when the 3D semiconductor structure is programming and erasing, and each of the first and second memory cells has a diode.
公开/授权文献
- US08304755B2 Three-dimensional semiconductor structure 公开/授权日:2012-11-06
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