发明申请
- 专利标题： Molecular Beam Cell Having Purge Function
- 专利标题（中）： 具有清除功能的分子束单元
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申请号： US12223426申请日： 2007-01-29
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公开(公告)号： US20100218723A1公开(公告)日： 2010-09-02
- 发明人: Takatoshi Yamamoto , Shinya Umemoto , Tetsuhiro Tanabe , Yoshio Nishimoto
- 申请人： Takatoshi Yamamoto , Shinya Umemoto , Tetsuhiro Tanabe , Yoshio Nishimoto
- 申请人地址： JP Kyoto-shi
- 专利权人： ROHM CO., LTD
- 当前专利权人： ROHM CO., LTD
- 当前专利权人地址： JP Kyoto-shi
- 优先权： JP2006-020724 20060130
- 国际申请： PCT/JP2007/051389 WO 20070129
- 主分类号： C30B23/06
- IPC分类号： C30B23/06 ; C23C16/00
摘要：
A molecular beam cell includes a crucible (2) for containing a material (29), a coil heater (3) for heating the material (29), and a side reflector (5) for reflecting the heat from the coil heater (3). The molecular beam cell further includes a base (7) supporting the crucible (2), the coil heater (3) and the side reflector (5). The base (7) is held by a disc-shaped flange (9) via a plurality of posts (20). A purge gas introduction pipe (44) for supplying purge gas (48) into the crucible (2) is provided, whereby ambient gas (36) is prevented from coming into contact with the material (29).
公开/授权文献
- US1663910A Water-tube boiler 公开/授权日：1928-03-27
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