发明申请
- 专利标题: Methods for Preparation of High-Purity Polysilicon Rods Using a Metallic Core Means
- 专利标题(中): 使用金属核心手段制备高纯度多晶硅棒的方法
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申请号: US12160837申请日: 2007-05-21
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公开(公告)号: US20100221454A1公开(公告)日: 2010-09-02
- 发明人: Hee Young Kim , Kyung Koo Yoon , Young Ki Park , Won Choon Choi , Sang Jin Moon
- 申请人: Hee Young Kim , Kyung Koo Yoon , Young Ki Park , Won Choon Choi , Sang Jin Moon
- 优先权: KR10-2006-0045707 20060522
- 国际申请: PCT/KR2007/002457 WO 20070521
- 主分类号: C23C16/24
- IPC分类号: C23C16/24 ; C23C16/46
摘要:
The present invention relates to a method for preparing a polysilicon rod using a metallic core means, comprising: installing a core means in an inner space of a deposition reactor used for preparing a silicon rod, wherein the core means (C) is constituted by forming one or a plurality of separation layer(s) on the surface of a metallic core element and is connected to an electrode means (E), heating the core means (C) by supplying electricity through the electrode means (E), and supplying a reaction gas (Gf) into the inner space (Ri) for silicon deposition, thereby forming a deposition output in an outward direction on the surface of the core means (C). According to the present invention, the deposition output (D) and the core means (C) can be separated easily from the silicon rod output obtained by the process of silicon deposition, and the contamination of the deposition output caused by impurities of the metallic core element (Ca) can be minimized, thereby a high-purity silicon can be prepared in a more economic and convenient way.
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