发明申请
US20100221894A1 METHOD FOR MANUFACTURING NANOWIRES BY USING A STRESS-INDUCED GROWTH
审中-公开
使用应力诱导生长制造纳米微粒的方法
- 专利标题: METHOD FOR MANUFACTURING NANOWIRES BY USING A STRESS-INDUCED GROWTH
- 专利标题(中): 使用应力诱导生长制造纳米微粒的方法
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申请号: US12064861申请日: 2006-12-28
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公开(公告)号: US20100221894A1公开(公告)日: 2010-09-02
- 发明人: Woo Young Lee , Jin Hee Ham , Woo Young Shim , Jong Wook Roh , Seung Hyun Lee , Kye Jin Jeong
- 申请人: Woo Young Lee , Jin Hee Ham , Woo Young Shim , Jong Wook Roh , Seung Hyun Lee , Kye Jin Jeong
- 申请人地址: KR Seoul
- 专利权人: Industry-Academic Cooperation Foundation, Yonsei University
- 当前专利权人: Industry-Academic Cooperation Foundation, Yonsei University
- 当前专利权人地址: KR Seoul
- 优先权: KR10-2006-0137069 20061228; KR10-2007-0051236 20070528
- 国际申请: PCT/KR07/06944 WO 20061228
- 主分类号: H01L21/20
- IPC分类号: H01L21/20
摘要:
Provided is a method for manufacturing a nanowire using stress-induced growth. The method includes: providing a substrate with an intermediate layer formed thereon; forming thin film on the intermediate layer, wherein the thin film made of material having more than 2×10−6/° C. of thermal expansion coefficient difference from the intermediate layer; inducing tensile stress due to the thermal expansion coefficient difference between the thin film and the substrate by performing a heat treatment on the substrate with the thin film formed; and growing single-crystalline nanowire of the material by inducing compressive stress at the thin film through cooling of the substrate.
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