- 专利标题: Silicon Chip Having Through Via and Method for Making the Same
- 专利标题(中): 通过硅片和其制造方法
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申请号: US12647856申请日: 2009-12-28
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公开(公告)号: US20100230759A1公开(公告)日: 2010-09-16
- 发明人: Hsueh-An Yang , Pei-Chun Chen , Chien-Hua Chen
- 申请人: Hsueh-An Yang , Pei-Chun Chen , Chien-Hua Chen
- 优先权: TW098108312 20090313
- 主分类号: H01L23/48
- IPC分类号: H01L23/48 ; H01L27/092 ; H01L21/768
摘要:
The present invention relates to a silicon chip having a through via and a method for making the same. The silicon chip includes a silicon substrate, a passivation layer, at least one electrical device and at least one through via. The passivation layer is disposed on a first surface of the silicon substrate. The electrical device is disposed in the silicon substrate, and exposed to a second surface of the silicon substrate. The through via includes a barrier layer and a conductor, and penetrates the silicon substrate and the passivation layer. A first end of the through via is exposed to the surface of the passivation layer, and a second end of the through via connects the electrical device. When a redistribution layer is formed on the surface of the passivation layer, the redistribution layer will not contact the silicon substrate, thus avoiding a short circuit. Therefore, a lower resolution process can be used, which results in low manufacturing cost and simple manufacturing process.
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