发明申请
- 专利标题： EVAPORATOR, COATING INSTALLATION, AND METHOD FOR USE THEREOF
- 专利标题（中）： 蒸发器，涂装安装及其使用方法
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申请号： US12405049申请日： 2009-03-16
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公开(公告)号： US20100233353A1公开(公告)日： 2010-09-16
- 发明人: Marcel Martini , Thomas Gebele , Uwe Hoffmann , Stefan Bangert , Michael Koenig
- 申请人： Marcel Martini , Thomas Gebele , Uwe Hoffmann , Stefan Bangert , Michael Koenig
- 申请人地址： US CA Santa Clara
- 专利权人： Applied Materials, Inc.
- 当前专利权人： Applied Materials, Inc.
- 当前专利权人地址： US CA Santa Clara
- 主分类号： C23C16/00
- IPC分类号： C23C16/00
摘要：
An evaporator for applying vapor to a substrate at a coating rate is described. The evaporator includes an evaporator tube having a distribution pipe with at least one nozzle outlet, wherein the evaporator tube includes a pressure measurement device, the pressure measurement device comprising an optical diaphragm gauge.
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