发明申请
- 专利标题: ACOUSTIC WAVE DEVICE AND METHOD OF PRODUCING THE SAME
- 专利标题(中): 声波装置及其制造方法
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申请号: US12647071申请日: 2009-12-24
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公开(公告)号: US20100244624A1公开(公告)日: 2010-09-30
- 发明人: Satoru MATSUDA , Michio Miura , Takashi Matsuda
- 申请人: Satoru MATSUDA , Michio Miura , Takashi Matsuda
- 申请人地址: JP Kawasaki
- 专利权人: FUJITSU LIMITED
- 当前专利权人: FUJITSU LIMITED
- 当前专利权人地址: JP Kawasaki
- 优先权: JP2009-074041 20090325
- 主分类号: H01L41/08
- IPC分类号: H01L41/08 ; H01L41/22 ; H01L41/047 ; B05D5/12
摘要:
A method of producing an acoustic wave device includes: forming an interdigital electrode 3 on a piezoelectric substrate 2; forming a barrier film 4 so as to cover the interdigital electrode 3; forming a medium 5 on the barrier film 4; measuring a frequency characteristic of an acoustic wave excited by the interdigital electrode 3; and forming, in an excitation region, an adjustment region having a thickness different from other portions by patterning the barrier film 4 or further providing an adjustment film. When forming the adjustment region, an area T of the adjusting area is adjusted in accordance with the measured frequency characteristic.
公开/授权文献
- US08720022B2 Method of producing an acoustic wave device 公开/授权日:2014-05-13
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