发明申请
- 专利标题: BI-SECTION SEMICONDUCTOR LASER DEVICE, METHOD FOR MANUFACTURING THE SAME, AND METHOD FOR DRIVING THE SAME
- 专利标题(中): 双分半导体激光器件,其制造方法及其驱动方法
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申请号: US12726524申请日: 2010-03-18
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公开(公告)号: US20100246622A1公开(公告)日: 2010-09-30
- 发明人: Hideki Watanabe , Takao Miyajima , Masao Ikeda , Hiroyuki Yokoyama , Tomoyuki Oki , Masaru Kuramoto
- 申请人: Hideki Watanabe , Takao Miyajima , Masao Ikeda , Hiroyuki Yokoyama , Tomoyuki Oki , Masaru Kuramoto
- 申请人地址: JP Tokyo JP Miyagi
- 专利权人: Sony Corporation,Tohoku University
- 当前专利权人: Sony Corporation,Tohoku University
- 当前专利权人地址: JP Tokyo JP Miyagi
- 优先权: JP2009-077070 20090326; JP2010-031299 20100216
- 主分类号: H01S5/323
- IPC分类号: H01S5/323 ; H01L21/20 ; H01L21/28
摘要:
A method for manufacturing a bi-section semiconductor laser device includes the steps of (A) forming a stacked structure obtained by stacking, on a substrate in sequence, a first compound semiconductor layer of a first conductivity type, a compound semiconductor layer that constitutes a light-emitting region and a saturable absorption region, and a second compound semiconductor layer of a second conductivity type; (B) forming a belt-shaped second electrode on the second compound semiconductor layer; (C) forming a ridge structure by etching at least part of the second compound semiconductor layer using the second electrode as an etching mask; and (D) forming a resist layer for forming a separating groove in the second electrode and then forming the separating groove in the second electrode by wet etching so that the separating groove separates the second electrode into a first portion and a second portion.
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