发明申请
- 专利标题: AUTOMATIC FOCUS ADJUSTING MECHANISM AND OPTICAL IMAGE ACQUISITION APPARATUS
- 专利标题(中): 自动调焦机构和光学图像采集装置
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申请号: US12729307申请日: 2010-03-23
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公开(公告)号: US20100247085A1公开(公告)日: 2010-09-30
- 发明人: Masataka Shiratsuchi , Yoshinori Honguh , Masatoshi Hirono , Riki Ogawa , Shinji Sugihara
- 申请人: Masataka Shiratsuchi , Yoshinori Honguh , Masatoshi Hirono , Riki Ogawa , Shinji Sugihara
- 申请人地址: JP Tokyo JP Kasawaki-shi
- 专利权人: KABUSHIKI KAISHA TOSHIBA,ADVANCED MASK INSPECTION TECHNOLOGY, INC.
- 当前专利权人: KABUSHIKI KAISHA TOSHIBA,ADVANCED MASK INSPECTION TECHNOLOGY, INC.
- 当前专利权人地址: JP Tokyo JP Kasawaki-shi
- 优先权: JP2009-076753 20090326
- 主分类号: G03B13/00
- IPC分类号: G03B13/00
摘要:
In an automatic focus adjusting mechanism, a test sample having a patterned surface is mounted on a mount table, and an light beam passing through a slit formed in a field stop is applied to the patterned surface of the test sample. The light beam reflected from the test sample is split into two segment light beams. Focus adjusting aperture stops having respective apertures formed rhomboid are provided across the optical paths of the segment light beams. The amounts of the segment light beams passing through the rhomboid apertures are detected by light receiving units. Based on the difference between the detected light amounts, the position of the mount table is controlled by the focus adjusting unit.