摘要:
In an automatic focus adjusting mechanism, a test sample having a patterned surface is mounted on a mount table, and an light beam passing through a slit formed in a field stop is applied to the patterned surface of the test sample. The light beam reflected from the test sample is split into two segment light beams. Focus adjusting aperture stops having respective apertures formed rhomboid are provided across the optical paths of the segment light beams. The amounts of the segment light beams passing through the rhomboid apertures are detected by light receiving units. Based on the difference between the detected light amounts, the position of the mount table is controlled by the focus adjusting unit.
摘要:
In an automatic focus adjusting mechanism, a test sample having a patterned surface is mounted on a mount table, and an light beam passing through a slit formed in a field stop is applied to the patterned surface of the test sample. The light beam reflected from the test sample is split into two segment light beams. Focus adjusting aperture stops having respective apertures formed rhomboid are provided across the optical paths of the segment light beams. The amounts of the segment light beams passing through the rhomboid apertures are detected by light receiving units. Based on the difference between the detected light amounts, the position of the mount table is controlled by the focus adjusting unit.
摘要:
According to one embodiment, a surface light source device includes a light guide plate, and first and second light-emitting units. The light guide plate includes a flat portion and a curved portion. The curved portion guides, to the flat portion, light introduced from the end surface and transmits light introduced from the inner circumferential surface. The flat portion includes a light diffusing portion to diffuse the light guided by the curved portion, and a light-emitting surface to output the light diffused by the light diffusing portion. The first light-emitting unit emits light toward the end surface. The second light-emitting unit emits light toward the inner circumferential surface.
摘要:
A sheet thickness measuring device includes: an illumination unit that outputs a light that is illuminated into a stack of sheets from a first area defined on one of faces including a top face, a bottom face, and side faces of the stack of sheets; a detection unit that detects a light amount distribution of light entered into the stack of sheets and propagated to a second area through the stack of sheets, the second area defined on one of the side faces of the stack of sheets; and a calculation unit that calculates a thickness of a sheet in the stack of sheets based on the light amount distribution detected by the detection unit.
摘要:
In a Fresnel lens which is made of a lens material whose refraction index is n, and focuses light beam from a light source at a specified radiation view angle φ, and has plural N pieces of circular lens surfaces arranged concentrically around a common optical axis, and plural circular rise surfaces arranged adjacent alternately between these lens surfaces, and two lens surfaces adjacent via at least one of the rise surfaces are concave surfaces, and tangent lines and at the intersecting point with the rise surfaces of the shape of a cross section passing through the optical axis of those lens surfaces intersect at the outside with respect to the optical axis, and when the angle formed between these tangent lines is defined as θ, a relational equation θ≧φ/(2 n N) stands.
摘要:
The present invention provides a step difference detection apparatus including an illumination section for emitting illumination light, an incident section for making the illumination light emitted by the illumination section be incident on a plurality of small illumination regions on an object carried in a predetermined carrier direction from different directions, an image sensing section for inputting an image of the regions on the object illuminated with the illumination light which is made to be incident by the incident section, and a detection section for detecting a step difference on the object on the basis of the image sensed by the image sensing section.
摘要:
According to one embodiment, a surface light source device includes a light guide plate, and first and second light-emitting units. The light guide plate includes a flat portion and a curved portion. The curved portion guides, to the flat portion, light introduced from the end surface and transmits light introduced from the inner circumferential surface. The flat portion includes a light diffusing portion to diffuse the light guided by the curved portion, and a light-emitting surface to output the light diffused by the light diffusing portion. The first light-emitting unit emits light toward the end surface. The second light-emitting unit emits light toward the inner circumferential surface.
摘要:
According to one embodiment, illumination apparatus including, first light source module which includes light-emitting module that emits light, light-emitting module having line shape, and first reflection member which includes first reflection surface that reflects light emitted from light-emitting module of first light source module for predetermined range, wherein first reflection surface has cross section that has zigzag line shape including plurality of line segments running along standard oval, which has major axis that forms predetermined angle with direction perpendicular to predetermined range, in direction perpendicular to longitudinal direction of light-emitting module of first light source module.
摘要:
A sheet thickness measuring device includes: an illumination unit that outputs a light that is illuminated into a stack of sheets from a first area defined on one of faces including a top face, a bottom face, and side faces of the stack of sheets; a detection unit that detects a light amount distribution of light entered into the stack of sheets and propagated to a second area through the stack of sheets, the second area defined on one of the side faces of the stack of sheets; and a calculation unit that calculates a thickness of a sheet in the stack of sheets based on the light amount distribution detected by the detection unit.
摘要:
In a Fresnel lens which is made of a lens material whose refraction index is n, and focuses light beam from a light source at a specified radiation view angle φ, and has plural N pieces of circular lens surfaces arranged concentrically around a common optical axis, and plural circular rise surfaces arranged adjacent alternately between these lens surfaces, and two lens surfaces adjacent via at least one of the rise surfaces are concave surfaces, and tangent lines and at the intersecting point with the rise surfaces of the shape of a cross section passing through the optical axis of those lens surfaces intersect at the outside with respect to the optical axis, and when the angle formed between these tangent lines is defined as θ, a relational equation θ≧φ/(2 n N) stands.