发明申请
US20100258103A1 METHOD FOR SLICING WORKPIECE BY USING WIRE SAW AND WIRE SAW 有权
使用电线和线锯切割工件的方法

  • 专利标题: METHOD FOR SLICING WORKPIECE BY USING WIRE SAW AND WIRE SAW
  • 专利标题(中): 使用电线和线锯切割工件的方法
  • 申请号: US12734452
    申请日: 2008-12-01
  • 公开(公告)号: US20100258103A1
    公开(公告)日: 2010-10-14
  • 发明人: Koji Kitagawa
  • 申请人: Koji Kitagawa
  • 申请人地址: JP Tokyo
  • 专利权人: Shin-Etsu Handotai Co., Ltd.
  • 当前专利权人: Shin-Etsu Handotai Co., Ltd.
  • 当前专利权人地址: JP Tokyo
  • 优先权: JP2007-327890 20071219
  • 国际申请: PCT/JP2008/003540 WO 20081201
  • 主分类号: B28D5/04
  • IPC分类号: B28D5/04 B28D7/00
METHOD FOR SLICING WORKPIECE BY USING WIRE SAW AND WIRE SAW
摘要:
The present invention is a wire saw in which a wire is wound around a plurality of grooved rollers, the workpiece is sliced into wafers by causing the wire to travel and pressing the workpiece against the wire while a slurry is supplied to the grooved rollers, the wire saw controlling in such a manner that the workpiece is sliced while a supply temperature of the slurry is increased from the start to the end of slicing the workpiece. As a result, there is provided a wire saw in which Warp of the workpiece to be sliced can be improved by suppressing a decrease in a temperature of the workpiece in the vicinity of the slicing end portion of the workpiece and by making an increase in displacement of the grooved roller during slicing straight, that is, by making the slicing trajectory depicted in the workpiece close to a straight line.
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