发明申请
US20100260977A1 CHEMICAL MECHANICAL FABRICATION (CMF) FOR FORMING TILTED SURFACE FEATURES
审中-公开
用于形成倾斜表面特征的化学机械制造（CMF）
- 专利标题： CHEMICAL MECHANICAL FABRICATION (CMF) FOR FORMING TILTED SURFACE FEATURES
- 专利标题（中）： 用于形成倾斜表面特征的化学机械制造（CMF）
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申请号： US12759307申请日： 2010-04-13
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公开(公告)号： US20100260977A1公开(公告)日： 2010-10-14
- 发明人: Rajiv K. Singh , Purushottam Kumar , Deepika Singh , Arul Chakkaravarthi Arjunan
- 申请人： Rajiv K. Singh , Purushottam Kumar , Deepika Singh , Arul Chakkaravarthi Arjunan
- 申请人地址： US FL Gainesville US FL Gainesville
- 专利权人： SINMAT, INC.,UNIVERSITY OF FLORIDA RESEARCH FOUNDATION, INC.
- 当前专利权人： SINMAT, INC.,UNIVERSITY OF FLORIDA RESEARCH FOUNDATION, INC.
- 当前专利权人地址： US FL Gainesville US FL Gainesville
- 主分类号： B32B3/00
- IPC分类号： B32B3/00 ; B32B43/00
摘要：
A method of chemical-mechanical fabrication (CMF) for forming articles having tilted surface features. A substrate is provided having a patterned surface including two different layer compositions or a non-planar surface having at least one protruding or recessed feature, or both. The patterned surface are contacted with a polishing pad having a slurry composition, wherein a portion of surface being polished polishes at a faster polishing rate as compared to another portion to form at least one tilted surface feature. The tilted surface feature has at least one surface portion having a surface tilt angle from 3 to 85 degrees and a surface roughness
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