摘要:
Slurry compositions and chemically activated CMP methods for polishing a substrate having a silicon carbide surface using such slurries. In such methods, the silicon carbide surface is contacted with a CMP slurry composition that comprises i) a liquid carrier and ii) a plurality of particles having at least a soft surface portion, wherein the soft surface portion includes a transition metal compound that provides a Mohs hardness
摘要:
An epitaxial article includes a substrate having a substrate surface having a substrate surface composition including crystalline defect or amorphous regions and crystalline non-defect regions. The crystalline defect or amorphous regions are recessed from the substrate surface by surface recess regions. A capping material fills the surface recess regions to provide capped defects that extend from a top of the defect regions to the substrate surface. The capping material is compositionally different from the substrate surface composition. An epitaxial layer over the substrate surface provides an average crystalline defect density in at least one area having a size ≧0.5 μm2 that is ≧ two times lower than an average crystalline defect density in that area at or below the substrate surface.
摘要:
The present invention provides an application specific integrated circuit and a method of operation thereof. In one advantageous embodiment, the application specific integrated circuit includes a programmable logic core having an array of dynamically configurable arithmetic logic units. This particular embodiment further includes a network interface subsystem that includes a media access controller. The network interface is configured to employ a first portion of the programmable logic core that interfaces with the media access controller and that is configurable to process control data. This embodiment further includes a data transmission subsystem associated with a memory device, and configured to employ a second portion of the programmable logic core that stores received data from the network interface subsystem to the memory device and sends transmission data from the memory device to the network interface subsystem in response to an instruction from a host system.
摘要:
Slurry compositions and chemically activated CMP methods for polishing a substrate having a silicon carbide surface using such slurries. In such methods, the silicon carbide surface is contacted with a CMP slurry composition that comprises i) a liquid carrier and ii) a plurality of particles having at least a soft surface portion, wherein the soft surface portion includes a transition metal compound that provides a Mohs hardness ≦6, and optionally iii) an oxidizing agent. The oxidizing agent can include a transition metal. The slurry is moved relative to the silicon carbide comprising surface, wherein at least a portion of the silicon carbide surface is removed.
摘要:
A method of forming a crystalline thin film from an amorphous semiconductor thin film such as amorphous silicon, by providing a generally planar nucleation inducing member, such as a crystalline silicon wafer, having a number of micro-scale surface contact points and with a hardness equal to or greater than the hardness of the amorphous semiconductor thin film, contacting under pressure the surface contact points of the nucleation inducing member with the exposed surface of the amorphous thin film to form an assembly, annealing the assembly at between 300 to 700 degrees C. for 1 to 24 hours to crystallize the amorphous thin film, and removing the nucleation inducing member.
摘要:
A method of producing an improved adherent interface between a film or coating and a substrate of metal, ceramic, or composite material by laser treatment of the surface. Semi-periodic microscale surface structures of less than 200 microns in magnitude are made by laser radiation of at least 50 pulses with an energy density of 0.01 to 15 J/cm.sup.2 and a duration of 100 femtoseconds to 1 millisecond on each surface area treated.
摘要翻译:一种通过激光处理表面在金属,陶瓷或复合材料的膜或涂层和基底之间产生改善的粘附界面的方法。 小于200微米的半周期微尺度表面结构的幅度通过至少50个脉冲的激光辐射,每个表面处理的能量密度为0.01至15J / cm 2,持续时间为100飞秒至1毫秒。
摘要:
A method of chemically-mechanically polishing a substrate having a Group III-nitride surface includes providing a chemical-mechanical polishing slurry composition. The slurry composition includes a slurry solution including a liquid carrier and an oxidizer including a transition metal or a per-based compound. The slurry solution includes at least one component that reacts with the Group III-nitride surface to form a softened Group III-nitride surface. The Group III-nitride comprising surface is contacted with the slurry composition by a pad to form the softened Group III-nitride surface. The pad is moved relative to the softened Group III-nitride surface, wherein at least a portion of the softened Group III-nitride surface is removed.
摘要:
Slurry compositions and chemically activated CMP methods for polishing a substrate having a silicon carbide surface using such slurries. In such methods, the silicon carbide surface is contacted with a CMP slurry composition that comprises i) a liquid carrier and ii) a plurality of particles having at least a soft surface portion, wherein the soft surface portion includes a transition metal compound that provides a Mohs hardness ≦6, and optionally iii) an oxidizing agent. The oxidizing agent can include a transition metal. The slurry is moved relative to the silicon carbide comprising surface, wherein at least a portion of eth silicon carbide surface is removed.
摘要:
A slurry for chemical mechanical polishing (CMP) of a copper or silver containing film provides at least one reactant for reacting with the copper or silver film to form a soft layer on the surface of the copper or silver film. The soft layer has a hardness less than the copper or silver film. The slurry preferably includes either no particles or particles which are softer than the copper or silver layer. A method for chemical mechanical polishing (CMP) a copper or silver containing film includes the steps of providing a slurry for reacting with the copper or silver film to form a soft layer on the surface of the copper or silver film and uses either no particles or particles softer than the copper or silver film, applying the slurry to the copper or silver film to form the soft layer, and removing the soft layer using a polishing pad.
摘要:
A method for increasing the surface area and roughness of metals, ceramics and composites on a micro-scale, and the surfaces themselves, is disclosed whereby a laser beam having a radiation wavelength of from UV to infrared is pulsed onto the surface of the material. The energy density of the radiation is between 0.01 to 15 J/cm.sup.2 and at least 50 pulses of radiation having duration of from 1 picosecond to 1 millisecond are used on each area. The surface structures formed are semi-periodic and are from 1/4 to several hundred microns in magnitude.