发明申请
- 专利标题： TIO2-CONTAINING SILICA GLASS
- 专利标题（中）： 含TIO2的二氧化硅玻璃
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申请号： US12824923申请日： 2010-06-28
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公开(公告)号： US20100261597A1公开(公告)日： 2010-10-14
- 发明人: Akio KOIKE , Yasutomi Iwahashi , Shinya Kikugawa
- 申请人： Akio KOIKE , Yasutomi Iwahashi , Shinya Kikugawa
- 申请人地址： JP Chiyoda-ku
- 专利权人： ASAHI GLASS COMPANY LIMITED
- 当前专利权人： ASAHI GLASS COMPANY LIMITED
- 当前专利权人地址： JP Chiyoda-ku
- 优先权： JP2007-336603 20071227
- 主分类号： C03C3/04
- IPC分类号： C03C3/04
摘要：
The present invention is to provide a TiO2—SiO2 glass having suitable thermal expansion properties as an optical member of an exposure tool for EUVL. The present invention relates to a TiO2-containing silica glass having a temperature, at which a coefficient of thermal expansion is 0 ppb/° C., falling within the range of 23±4° C. and a temperature width, in which a coefficient of thermal expansion is 0±5 ppb/° C., of 5° C. or more.
公开/授权文献
- US07989378B2 TiO2-containing silica glass 公开/授权日：2011-08-02
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