发明申请
US20100291727A1 ROLL-TO-ROLL PROCESSING METHOD AND TOOLS FOR ELECTROLESS DEPOSITION OF THIN LAYERS 失效
薄膜电镀沉积法的滚动加工方法与工具

  • 专利标题: ROLL-TO-ROLL PROCESSING METHOD AND TOOLS FOR ELECTROLESS DEPOSITION OF THIN LAYERS
  • 专利标题(中): 薄膜电镀沉积法的滚动加工方法与工具
  • 申请号: US12581787
    申请日: 2009-10-19
  • 公开(公告)号: US20100291727A1
    公开(公告)日: 2010-11-18
  • 发明人: Jalal ASHJAEE
  • 申请人: Jalal ASHJAEE
  • 申请人地址: US CA San Jose
  • 专利权人: SoloPower, Inc.
  • 当前专利权人: SoloPower, Inc.
  • 当前专利权人地址: US CA San Jose
  • 主分类号: H01L31/0216
  • IPC分类号: H01L31/0216 B05C11/00 B05C11/10
ROLL-TO-ROLL PROCESSING METHOD AND TOOLS FOR ELECTROLESS DEPOSITION OF THIN LAYERS
摘要:
A deposition method and a system are provided to deposit a CdS buffer layer on a surface of a solar cell absorber layer of a flexible workpiece from a process solution including all chemical components of the CdS buffer layer material. CdS is deposited from the deposition solution while the flexible workpiece is elastically shaped by a series of shaping rollers to retain the process solution on the solar cell absorber layer and while the flexible workpiece is heated by contacting to a heated liquid that the shaping rollers are fully or partially immersed. The flexible workpiece is elastically shaped by pulling a back surface of the flexible workpiece into surface cavity of the shaping rollers using magnetic force.
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