发明申请
- 专利标题: ROLL-TO-ROLL PROCESSING METHOD AND TOOLS FOR ELECTROLESS DEPOSITION OF THIN LAYERS
- 专利标题(中): 薄膜电镀沉积法的滚动加工方法与工具
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申请号: US12581787申请日: 2009-10-19
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公开(公告)号: US20100291727A1公开(公告)日: 2010-11-18
- 发明人: Jalal ASHJAEE
- 申请人: Jalal ASHJAEE
- 申请人地址: US CA San Jose
- 专利权人: SoloPower, Inc.
- 当前专利权人: SoloPower, Inc.
- 当前专利权人地址: US CA San Jose
- 主分类号: H01L31/0216
- IPC分类号: H01L31/0216 ; B05C11/00 ; B05C11/10
摘要:
A deposition method and a system are provided to deposit a CdS buffer layer on a surface of a solar cell absorber layer of a flexible workpiece from a process solution including all chemical components of the CdS buffer layer material. CdS is deposited from the deposition solution while the flexible workpiece is elastically shaped by a series of shaping rollers to retain the process solution on the solar cell absorber layer and while the flexible workpiece is heated by contacting to a heated liquid that the shaping rollers are fully or partially immersed. The flexible workpiece is elastically shaped by pulling a back surface of the flexible workpiece into surface cavity of the shaping rollers using magnetic force.
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