发明申请
US20100297556A1 Coating compositions suitable for use with an overcoated photoresist 审中-公开
适用于外涂光致抗蚀剂的涂料组合物

Coating compositions suitable for use with an overcoated photoresist
摘要:
Organic coating compositions, particularly antireflective coating compositions, are provided that comprise that comprise a diene/dienophile reaction product. Preferred compositions of the invention are useful to reduce reflection of exposing radiation from a substrate back into an overcoated photoresist layer and/or function as a planarizing, conformal or via-fill layer.
信息查询
0/0