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公开(公告)号：US20100297556A1
公开(公告)日：2010-11-25
申请号：US12658614
申请日：2010-02-08
IPC分类号： G03F7/004 , G03F7/20 , C08G73/10 , C07D487/08
CPC分类号： G03F7/091 , B05D1/005 , B05D3/0254 , B05D3/06 , B05D5/061 , B05D7/54 , C08F220/36 , C09D5/006 , C09D133/12 , G03F7/11 , G03F7/16 , G03F7/20 , G03F7/322
摘要： Organic coating compositions, particularly antireflective coating compositions, are provided that comprise that comprise a diene/dienophile reaction product. Preferred compositions of the invention are useful to reduce reflection of exposing radiation from a substrate back into an overcoated photoresist layer and/or function as a planarizing, conformal or via-fill layer.
摘要翻译： 提供了包含二烯/亲二烯体反应产物的有机涂料组合物，特别是抗反射涂料组合物。 本发明的优选组合物可用于减少来自衬底的曝光辐射反射回外涂光致抗蚀剂层的反射和/或作为平坦化，保形或通孔填充层的功能。
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公开(公告)号：US08883407B2
公开(公告)日：2014-11-11
申请号：US12813228
申请日：2010-06-10
IPC分类号： G03F7/30 , G03F7/09 , G03F7/16 , G03F7/20 , C08F220/36 , G03F7/095 , H01L21/027
CPC分类号： C09D5/006 , C07C69/76 , C07C69/94 , C08F220/36 , C09D133/14 , G03F7/091 , G03F7/16 , G03F7/168 , G03F7/20 , G03F7/322 , H01L21/0276
摘要： In one aspect, organic coating compositions, particularly antireflective coating compositions, are provided that comprise a diene/dienophile reaction product. In another aspect, organic coating compositions, particularly antireflective coating compositions, are provided that comprise a component comprising a hydroxyl-naphthoic group, such as a 6-hydroxy-2-naphthoic group Preferred compositions of the invention are useful to reduce reflection of exposing radiation from a substrate back into an overcoated photoresist layer and/or function as a planarizing, conformal or via-fill layer.
摘要翻译： 在一个方面，提供了包含二烯/亲二烯体反应产物的有机涂料组合物，特别是抗反射涂料组合物。 在另一方面，提供了包含包含羟基 - 萘甲酸基团的组分的有机涂料组合物，特别是抗反射涂料组合物，例如6-羟基-2-萘甲酸基团。本发明的优选组合物可用于减少曝光辐射的反射 从衬底返回到外涂光致抗蚀剂层和/或作为平坦化，共形或通孔填充层的功能。
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公开(公告)号：US20110003250A1
公开(公告)日：2011-01-06
申请号：US12813228
申请日：2010-06-10
CPC分类号： C09D5/006 , C07C69/76 , C07C69/94 , C08F220/36 , C09D133/14 , G03F7/091 , G03F7/16 , G03F7/168 , G03F7/20 , G03F7/322 , H01L21/0276
摘要： In one aspect, organic coating compositions, particularly antireflective coating compositions, are provided that comprise that comprise a diene/dienophile reaction product. In another aspect, organic coating compositions, particularly antireflective coating compositions, are provided that comprise a component comprising a hydroxyl-naphthoic group, such as a 6-hydroxy-2-naphthoic group Preferred compositions of the invention are useful to reduce reflection of exposing radiation from a substrate back into an overcoated photoresist layer and/or function as a planarizing, conformal or via-fill layer.
摘要翻译： 一方面，提供了包含二烯/亲二烯体反应产物的有机涂料组合物，特别是抗反射涂料组合物。 在另一方面，提供了包含包含羟基 - 萘甲酸基团的组分的有机涂料组合物，特别是抗反射涂料组合物，例如6-羟基-2-萘甲酸基团。本发明的优选组合物可用于减少曝光辐射的反射 从衬底返回到外涂光致抗蚀剂层和/或作为平坦化，共形或通孔填充层的功能。
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公开(公告)号：US09726977B2
公开(公告)日：2017-08-08
申请号：US12658615
申请日：2010-02-08
申请人： James F. Cameron , Jin Wuk Sung , John P. Amara , Greogory P. Prokopowicz , David A. Valeri , Libor Vyklicky , Wu-Song S. Huang , Wenjie Li , Pushkara R. Varanasi , Irene Y. Popova
发明人： James F. Cameron , Jin Wuk Sung , John P. Amara , Greogory P. Prokopowicz , David A. Valeri , Libor Vyklicky , Wu-Song S. Huang , Wenjie Li , Pushkara R. Varanasi , Irene Y. Popova
摘要： Organic coating compositions, particularly antireflective coating compositions, are provided that can be developed with an aqueous alkaline developer, including in a single step during development of an overcoated photoresist layer. Preferred coating compositions comprise a tetrapolymer that comprises at least four distinct functional groups.
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公开(公告)号：US08940472B2
公开(公告)日：2015-01-27
申请号：US12658614
申请日：2010-02-08
IPC分类号： G03F7/11 , G03F7/16 , G03F7/30 , G03F7/09 , C08F220/36
CPC分类号： G03F7/091 , B05D1/005 , B05D3/0254 , B05D3/06 , B05D5/061 , B05D7/54 , C08F220/36 , C09D5/006 , C09D133/12 , G03F7/11 , G03F7/16 , G03F7/20 , G03F7/322
摘要： Organic coating compositions, particularly antireflective coating compositions, are provided that comprise that comprise a diene/dienophile reaction product. Preferred compositions of the invention are useful to reduce reflection of exposing radiation from a substrate back into an overcoated photoresist layer and/or function as a planarizing, conformal or via-fill layer.
摘要翻译： 提供了包含二烯/亲二烯体反应产物的有机涂料组合物，特别是抗反射涂料组合物。 本发明的优选组合物可用于减少来自衬底的曝光辐射反射回外涂光致抗蚀剂层的反射和/或作为平坦化，保形或通孔填充层的功能。
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公开(公告)号：US20100297557A1
公开(公告)日：2010-11-25
申请号：US12658615
申请日：2010-02-08
申请人： James F. Cameron , Jin Wuk Sung , John P. Amara , Greogory P. Prokopowicz , David A. Valeri , Libor Vyklicky , Wu-Song S. Huang , Wenjie Li , Pushkara R. Varanasi , Irene Y. Popova
发明人： James F. Cameron , Jin Wuk Sung , John P. Amara , Greogory P. Prokopowicz , David A. Valeri , Libor Vyklicky , Wu-Song S. Huang , Wenjie Li , Pushkara R. Varanasi , Irene Y. Popova
摘要： Organic coating compositions, particularly antireflective coating compositions, are provided that can be developed with an aqueous alkaline developer, including in a single step during development of an overcoated photoresist layer. Preferred coating compositions comprise a tetrapolymer that comprises at least four distinct functional groups.
摘要翻译： 提供了可以用含水碱性显影剂显影的有机涂料组合物，特别是抗反射涂料组合物，包括在外涂光致抗蚀剂层的显影过程中的一个步骤。 优选的涂料组合物包含包含至少四个不同官能团的四元共聚物。
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公开(公告)号：US20090148789A1
公开(公告)日：2009-06-11
申请号：US12291641
申请日：2008-11-12
CPC分类号： G03F7/091 , G03F7/0752
摘要： In one aspect, the invention relates to silicon-containing organic coating compositions, particularly antireflective coating compositions, that contain a repeat unit wherein chromophore moieties such as phenyl are spaced from Si atom(s). In another aspect, silicon-containing underlayer compositions are provided that are formulated as a liquid (organic solvent) composition, where at least one solvent of the solvent component comprise hydroxy groups.
摘要翻译： 一方面，本发明涉及含有有机涂料组合物，特别是抗反射涂料组合物，其含有重复单元，其中发色团部分例如苯基与Si原子间隔开。 在另一方面，提供了配制成液体（有机溶剂）组合物的含硅底层组合物，其中溶剂组分的至少一种溶剂包含羟基。
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公开(公告)号：US20100063225A1
公开(公告)日：2010-03-11
申请号：US12311378
申请日：2007-09-28
申请人： Timothy M. Swager , John P. Amara
发明人： Timothy M. Swager , John P. Amara
CPC分类号： C08G61/02 , C07C41/16 , C07C41/30 , C07C43/225 , C07C43/23
摘要： The present invention generally relates to methods for the synthesis of species including monomers and polymers. Methods of the invention comprise the use of chemical techniques including metathesis chemistry to synthesize, for example, monomers and/or polymers with desired functional groups.
摘要翻译： 本发明一般涉及用于合成包括单体和聚合物的物质的方法。 本发明的方法包括使用包括复分解化学在内的化学技术来合成例如具有所需官能团的单体和/或聚合物。
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公开(公告)号：US08283423B2
公开(公告)日：2012-10-09
申请号：US12311378
申请日：2007-09-28
申请人： Timothy M. Swager , John P. Amara
发明人： Timothy M. Swager , John P. Amara
IPC分类号： C08F2/00 , C08F279/00 , C08F38/00
CPC分类号： C08G61/02 , C07C41/16 , C07C41/30 , C07C43/225 , C07C43/23
摘要： The present invention generally relates to methods for the synthesis of species including monomers and polymers. Methods of the invention comprise the use of chemical techniques including metathesis chemistry to synthesize, for example, monomers and/or polymers with desired functional groups.
摘要翻译： 本发明一般涉及用于合成包括单体和聚合物的物质的方法。 本发明的方法包括使用包括复分解化学在内的化学技术来合成例如具有所需官能团的单体和/或聚合物。
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公开(公告)号：US08198096B2
公开(公告)日：2012-06-12
申请号：US11541028
申请日：2006-09-29
申请人： Timothy M. Swager , John P. Amara
发明人： Timothy M. Swager , John P. Amara
CPC分类号： C09K11/06 , C08G61/02 , C09K9/02 , C09K2211/1425 , Y10T436/14 , Y10T436/145555
摘要： The present invention relates to a class of luminescent and conductive polymer compositions having chromophores, and particularly solid films of these compositions exhibiting increased luminescent lifetimes, quantum yields and amplified emissions. These desirable properties can be provided through polymers having rigid groups designed to prevent polymer reorganization, aggregation or π-stacking upon solidification. These polymers can also display an unusually high stability with respect to solvent and heat exposures. The invention also relates to a sensor and a method for sensing an analyte through the luminescent and conductive properties of these polymers. Analytes can be sensed by activation of a chromophore at a polymer surface. Analytes include aromatics such as heterocycles, phosphate ester groups and in particular explosives and chemical warfare agents in a gaseous state. The present invention also relates to devices and methods for amplifying emissions by incorporating a polymer having an energy migration pathway and/or providing the polymer as a block co-polymer or as a multi-layer.
摘要翻译： 本发明涉及一类具有发色团的发光和导电聚合物组合物，特别是这些组合物的固体膜显示增加的发光寿命，量子产率和放大的发射。 这些所需的性质可以通过具有刚性基团的聚合物来提供，所述刚性基团被设计成防止聚合物重组，聚集或固化时堆积。 这些聚合物在溶剂和热暴露方面也能表现出非常高的稳定性。 本发明还涉及通过这些聚合物的发光和导电性质来感测分析物的传感器和方法。 可以通过在聚合物表面活化发色团来感测分析物。 分析物包括芳族化合物如杂环，磷酸酯基团，特别是气体中的爆炸物和化学战剂。 本发明还涉及通过引入具有能量迁移途径的聚合物和/或提供聚合物作为嵌段共聚物或作为多层来扩增发射的装置和方法。
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