Invention Application
US20100301448A1 SEMICONDUCTOR DEVICE AND METHOD FOR FORMING THE SAME 有权
半导体器件及其形成方法

SEMICONDUCTOR DEVICE AND METHOD FOR FORMING THE SAME
Abstract:
Provided is a semiconductor and a method for forming the same. The method includes forming a buried insulating layer locally in a substrate. The substrate is etched to form an opening exposing the buried insulating layer, and a silicon pattern spaced in at least one direction from the substrate is formed on the buried insulating layer. A first insulating layer is formed to enclose the silicon pattern.
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