发明申请
- 专利标题: SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
- 专利标题(中): 半导体器件及其制造方法
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申请号: US12526236申请日: 2008-02-29
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公开(公告)号: US20100308474A1公开(公告)日: 2010-12-09
- 发明人: Akinobu Shibuya , Koichi Takemura , Akira Ouchi , Tomoo Murakami
- 申请人: Akinobu Shibuya , Koichi Takemura , Akira Ouchi , Tomoo Murakami
- 优先权: JP2007-052103 20070301
- 国际申请: PCT/JP2008/053651 WO 20080229
- 主分类号: H01L23/488
- IPC分类号: H01L23/488 ; H01L21/56 ; H01L21/60
摘要:
A substrate (1) and a semiconductor chip (5) are connected by means of flip-chip interconnection. Around connecting pads (3) of the substrate (1) and input/output terminals (10) of the semiconductor chip (5), an underfill material (7) is injected. The underfill material (7) is a composite material of filler and resin in which the maximum particle diameter of the filler is 5 μm or below and whose filler content is 40 to 60 wt %. Also, a first main surface of the substrate (1), which is not covered with the underfill material (7), and the side surfaces of the semiconductor chip (5) are encapsulated with a molding material (8). The molding material (8) is a composite material of filler and resin whose filler content is over 75 wt % and in which the glass transition temperature of the resin is over 180° C. An integrated body of the substrate (1) and the semiconductor chip (5), which are covered with the molding material (8), is thinned from above and below.
公开/授权文献
- US08237292B2 Semiconductor device and method for manufacturing the same 公开/授权日:2012-08-07
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