- 专利标题： Gas Sensor and Manufacturing Method Thereof
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申请号： US12846562申请日： 2010-07-29
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公开(公告)号： US20100310792A1公开(公告)日： 2010-12-09
- 发明人: Bee-Yu Wei , Hong-Jen Lai , Pi-Guey Su , Ren-Jang Wu , Hong-Ming Lin , Yi-Lu Sun
- 申请人： Bee-Yu Wei , Hong-Jen Lai , Pi-Guey Su , Ren-Jang Wu , Hong-Ming Lin , Yi-Lu Sun
- 申请人地址： TW Hsinchu
- 专利权人： INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
- 当前专利权人： INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
- 当前专利权人地址： TW Hsinchu
- 优先权： TW92123548 20030827
- 主分类号： B05D5/12
- IPC分类号： B05D5/12 ; B06B1/20
摘要：
A gas sensor and manufacturing method thereof. The gas sensor includes a substrate, a pair of electrodes disposed on the substrate, and a gas sensing thin film covering the electrodes, the gas sensing thin film is made up of carbon nanotubes and tin oxide.
公开/授权文献
- US08178157B2 Gas sensor and manufacturing method thereof 公开/授权日：2012-05-15
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