Invention Application
- Patent Title: Radiation Beam Modification Apparatus and Method
- Patent Title (中): 辐射束修改装置及方法
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Application No.: US12774284Application Date: 2010-05-05
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Publication No.: US20100315612A1Publication Date: 2010-12-16
- Inventor: Wilhelmus Petrus DE BOEIJ , Leon Martin Levasier
- Applicant: Wilhelmus Petrus DE BOEIJ , Leon Martin Levasier
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Main IPC: G03B27/54
- IPC: G03B27/54

Abstract:
A radiation beam modification apparatus for controlling a property of a beam of radiation in a lithographic apparatus includes a flexible sheet provided with a plurality of apertures, and a positioning apparatus comprising a first rotatable member and a second rotatable member, wherein a first end portion of the flexible sheet is coupled to the first rotatable member, a second end portion of the flexible sheet is coupled to the second rotatable member and a central portion of the flexible sheet extends between the first rotatable member and the second rotatable member. The apertures may be used to control the numerical aperture of a projection system of a lithographic apparatus.
Public/Granted literature
- US08351022B2 Radiation beam modification apparatus and method Public/Granted day:2013-01-08
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