[Problems] To provide processes that can increase the work function of electrodes by simple procedures, and organic EL devices that have an anode of high work function and a quality emitting surface showing excellent luminous properties (luminous efficiency, life) without uneven brightness or defects, and are free of leakage current.[Means for solving problems] A process for treating an electrode surface of the invention includes a contact step of bringing an electrode formed of a metal oxide or a metal into contact with an alkaline solution of a compound having an Si—O bond. An organic EL device according to the invention includes a metal oxide or metal anode that has been surface-treated by the process, and an emitting layer and a cathode laminated on the anode in this order.