发明申请
US20110003088A1 PLASMA CVD APPARATUS, PLASMA CVD METHOD, AND AGITATING DEVICE
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等离子体CVD装置,等离子体CVD方法和激活装置
- 专利标题: PLASMA CVD APPARATUS, PLASMA CVD METHOD, AND AGITATING DEVICE
- 专利标题(中): 等离子体CVD装置,等离子体CVD方法和激活装置
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申请号: US12865788申请日: 2008-02-06
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公开(公告)号: US20110003088A1公开(公告)日: 2011-01-06
- 发明人: Yuuji Honda , Takayuki Abe
- 申请人: Yuuji Honda , Takayuki Abe
- 国际申请: PCT/JP2008/052380 WO 20080206
- 主分类号: C23C16/458
- IPC分类号: C23C16/458 ; C23C16/00 ; C23C16/50
摘要:
The present invention provides a plasma CVD apparatus and a plasma CVD method capable of efficiently coating the surfaces of fine particles with a thin film or super-fine particles by concentrating a plasma near the fine particles. The plasma CVD apparatus according to the present invention is characterized by including a chamber 13, a container disposed in the chamber for housing fine particles 1, the container having a polygonal inner shape in a section approximately parallel to the direction of the gravity, a ground shielding member 27 for shielding the surface of the container other than a housing face for housing the fine particles 1, a rotation mechanism for causing the container to rotate or act as a pendulum on the axis of rotation approximately perpendicular to the section, an opposed electrode 21 disposed in the container so as to face the housing face, a plasma power source 23 electrically connected to the container, a gas introducing mechanism for introducing a raw gas into the container, and an evacuation mechanism for evacuating the inside of the chamber.
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