发明申请
- 专利标题： DEVICE MADE OF SINGLE-CRYSTAL SILICON
- 专利标题（中）： 单晶硅器件制造
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申请号： US12892008申请日： 2010-09-28
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公开(公告)号： US20110014794A1公开(公告)日： 2011-01-20
- 发明人: Arnd KAELBERER , Helmut Baumann , Roland Scheuerer , Heribert Weber
- 申请人： Arnd KAELBERER , Helmut Baumann , Roland Scheuerer , Heribert Weber
- 优先权： DE102007031549.1 20070706
- 主分类号： H01L21/306
- IPC分类号： H01L21/306
摘要：
A device made of single-crystal silicon having a first side, a second side which is situated opposite to the first side, and a third side which extends from the first side to the second side, the first side and the second side each extending in a 100 plane of the single-crystal silicon, the third side extending in a first area in a 111 plane of the single-crystal silicon. The third side extends in a second area in a 110 plane of the single-crystal silicon. Furthermore, a production method for producing a device made of single-crystal silicon is described.
公开/授权文献
- US08298962B2 Device made of single-crystal silicon 公开/授权日：2012-10-30
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